Predictive 3-D modeling of parasitic gate capacitance in gate-all-around cylindrical silicon nanowire MOSFETs

Jibin Zou,Qiumin Xu,Jieying Lou,Runsheng Wang,Ru Huang,Yangyuan Wang
DOI: https://doi.org/10.1109/TED.2011.2162521
IF: 3.1
2011-01-01
IEEE Transactions on Electron Devices
Abstract:In this paper, an analytical model for parasitic gate capacitances in gate-all-around cylindrical silicon nanowire MOSFETs (SNWTs) is developed for the first time. A practical 3-D architecture of SNWTs with surrounding-gate cylindrical channel and source/drain extension regions is taken into account in the parasitic gate capacitance modeling. The parasitic gate capacitances of the SNWT are divided...
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