Effect of Acetic Acid on ZnO Thin Films Fabricated by Ultrasonic Spray Pyrolysis

JIAO Bao-chen,ZHANG Xiao-dan,WEI Chang-chun,SUN Jian,ZHAO Ying
DOI: https://doi.org/10.16136/j.joel.2011.04.006
2011-01-01
Abstract:The ZnO thin films were fabricated on corning eagle 2 000 substrate by ultrasonic spray pyrolysis(USP).The zinc acetate dehydrate was used as source material.By investigating the pH of the initial solution,the structure,surface morphology,electrical and optical properties of the ZnO thin films,it is found that the acetic acid has great effect on the growth rate of ZnO thin films.According to XRD and SEM test results,all samples we obtained are hexagonal wurtzite structure oriented in the(002) crystallographic direction.When the acetic acid/zinc acetate is more than 0.02,the ZnO thin films show hexagonal platy surface morphology.The ZnO thin films have the resistivity of 10-1 Ω·cm,and the total transmittance is above 80% in the wide wavelength region from 400 nm to 2 000 nm.
What problem does this paper attempt to address?