Preparation of highly textured ZnO thin films by pulsed electron deposition

Peng Zhan,Zhengcao Li,Zhengjun Zhang
DOI: https://doi.org/10.2320/matertrans.M2011141
2011-01-01
MATERIALS TRANSACTIONS
Abstract:Pulsed electron deposition is a very promising means for growing high quality thin films even for complicated oxides. By investigating the influence of deposition parameters like the substrate temperature, the oxygen pressure in the chamber, as well as the pulse frequency and energy of the electrons on the growth of ZnO, the evolution of the [0002] orientation has been revealed and highly [0002] oriented ZnO thin films were obtained on Si (100) substrates at suitable conditions. [doi:10.2320/matertrans.M2011141]
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