Room Temperature Growth and Properties of ZnO Films by Pulsed Laser Deposition

Xiangli Ma,Jun Zhang,Jianguo Lu,Zhizhen Ye
DOI: https://doi.org/10.1016/j.apsusc.2010.08.057
IF: 6.7
2010-01-01
Applied Surface Science
Abstract:ZnO thin films were prepared by pulsed laser deposition at room temperature on glass substrates with oxygen pressures of 10–30Pa. The structural, electrical, and optical properties of ZnO films were studied in detail. ZnO films had an acceptable crystal quality with high c-axis orientation and smooth surface. The resistivity was in the 102Ωcm order for ZnO films, with the electron concentration of 1016–1017cm−3. All the films showed a high visible transmittance ∼90% and a high UV absorption about 90–100%. The UV emission ∼390nm was observed in the photoluminescence spectra. The oxygen pressures in the 10–30Pa range were suitable for room temperature growth of high-quality ZnO films.
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