Abstract:The color of AlN/Si/Al coating can be controlled by the thickness of the AlN layer according to the interference effect. However, the loading capacity is affected by the large hardness difference between the Si and Al layers. Corrosion resistance is relatively weak due to penetration defects in the AlN surface layer. In this work, therefore, a SiN/AlSiN/AlN interlayer is sputtered in between the Si/Al layer in the AlN/Si/Al coating as the transition layer. The chemical state, structure, morphology, color, hardness, and corrosion resistance of the as-deposited Al-Si-N coating are carefully characterized using x-ray photoelectron spectrometry, grazing incident x-ray diffraction, atomic force microscopy, scanning electron microscope, colorimeter, nanoindentation, and electrochemical corrosion meter, respectively. To evaluate the long-term corrosion resistance, the uncoated, AlN/Si/Al-coated, and AlN/Si/SiN/AlSiN/AlN/Al-coated AZ31B Mg alloys are immersed in salt solution for different durations, followed by characterization of morphology and composition. The results show that the SiN/AlSiN/AlN interlayer is of a gradient structure in both composition and hardness. The AlN crystals grow continuously from the Al bonding layer into the AlSiN layer, resulting in internal longitudinal grain boundaries. The coating surface becomes smoother with a roughness (Rq) of 12.6 nm. The color of the coating is controlled by the AlN surface layer thickness. The coating hardness increases from 6.5 to 20.6 GPa. The corrosion current density of the coating decreases from 2.02 × 10−6 to 1.99 × 10−8 A/cm2. The coating could withstand corrosion in salt solution for at least 192h. The gradient structure of the interlayer effectively alleviates the hardness difference between the Si layer and the Al layer and inhibits the penetration of the corrosive medium from the surface. The mechanism for the enhanced corrosion resistance is explained through a model.

Die backside stress modification by coating of Si3N4 or AlN layers

Fabrication and performance of Ni-Co-P/Si3N4 electroplated composite coatings on al-si alloys

Study of Local Stress Using Stress-Absorbing Si Diaphragm

Atomic-scale Stress Modulation of Nanolaminate for Micro-Led Encapsulation.

Enhancement of hardness and corrosion resistance of Al-Si-N multilayer color coating via SiN/AlSiN/AlN compositional gradient interlayer

A Novel Approach to Study Patterned Thin Film Local Stress for Microelectronics Application

Preliminary design of a novel AlN-Al composite coating used for micro-electronic packaging via finite element modeling

Improvement of thermal management capability of AlN coatings via adjusting nitrogen pressure

Effect of surface modification on interfacial microstructures and mechanical properties of continuous CF/Al composites

Investigation of fracture toughness and microstructure of micro-scaled multilayer-DLC/silicon system via pillar splitting method

Influence of film structure on the microstructure and properties of TiAlN coatings on Al-Si alloys

The effect of nickel coating on the mechanical properties and failure modes of continuous carbon fiber reinforced aluminum matrix composites

Effects of die top system and trenches on large thin die mechanical robustness

Effect of die coating on surface crack depth of hot extruded 7075 aluminum alloy

Molecular dynamics simulation of hybrid structure and mechanical properties of DLC/Ni-DLC thin films

Comparison of Cobalt Integration with Various Dielectric Materials under Thermal and Electrical Stress

Enhancing Semiconductor Package Reliability through Mechanical Property Optimization of Pressureless Sintering Die Attach Adhesives

The study of bare-die FCBGA die damage in response to applied mechanical stress during heat sink assembly

Minimizing residual stress of aluminum nitride (AlN) thin films using multi-step deposition of DC pulsed sputtering

Enhanced Mechanical and Tribological Capabilities of a Silicon Aluminum Alloy with an Electroplated Ni–Co–P/Si3N4 Composite Coating

Modeling the Effect of Diffusion Layer and Interface on the Flow Stress for a Ni/Al Laminate Prepared by Vacuum Hot Pressing