Abstract:On-chip integration of microfluidic devices are of great importance for analytical and bio-analytical applications. In this study, a “lab on chip” integrated micro glass microfluidic system based on the Micro-electromechanical System (MEMS) technology will be proposed including the fabrication of CFP process of a resonator and assembly of the on-chip system. The fabrication of the microfluidic chip including the micro reactors and channels with 3D spherical resonator integrated was firstly introduced. The resonators were driven by the Lorentz force by inducing alternation current into the serrate lead at the surface of the bulbiform glass resonators if the frequency alternation current is equal to the natural resonance of the glass bubbles. The ultrasonic wave originated by the glass bubbles will be transported by the water and be focused at the center of the spherical glass bubbles to get a high energy density. The next part was the integration of an alternating current (AC) source and the microfluidic chip on the same printed circuit board (PCB). A power amplifier was also integrated on the PCB since it was difficult to find an AC current generator producing current according to the requirement of the resonator. The final part was the injection of a solution containing the biological samples, such as DNA strand or cells. These samples could be seared or smashed by the ultrasonic wave to obtain the product we wanted.

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