Abstract:The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1–5 µm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (>three times) focal length and imaging of the characters ‘RIKEN’ in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications. By fabricating microscale polymer lenses in hollow glass microchannels, scientists realize an optofluidic chip that detects and counts cells. This scheme works by employing a femtosecond laser to ‘grow’ by two-photon polymerization various three-dimensional optical structures, such as microlens arrays, on a flat polymer scaffold on the internal surface of a microfluidic channel. White light is then shone through the lenses and the presence of cells in the optical path is detected by a drop in light transmission. Dong Wu and co-workers from RIKEN’s Laser Technology Laboratory in Japan and Jilin University in China say that this fabrication approach could also prove useful for constructing a variety of active and passive micro-optic devices, such as optical switches, on-chip microlasers and amplifiers for lab-on-a-chip applications.

Integrated on-chip lens applied to microfluidic chips

Optical Micro/nanofibre Embedded Soft Film Enables Multifunctional Flow Sensing in Microfluidic Chips

In Situ Fabrication of a Tunable Microlens.

Toward On-Chip Unidirectional and Single-Mode Polymer Microlaser

Fabrication of Micro/Nanofluidic Chip on Glass Substrate and Its Application for Electrokinetic Concentration of Proteins

Optimization and Fabrication of Micro Diffractive Lens Arrays for Biochip Application

Combined fluorescence with absorbance detection optical system used for microfluidic chips

In-channel Integration of Designable Microoptical Devices Using Flat Scaffold-Supported Femtosecond-Laser Microfabrication for Coupling-Free Optofluidic Cell Counting

Microfluidic Based Optical Microscopes on Chip

Design of Liquid Lens Based Optical System for Microfluidic Chip Detection

Integrated Optofluidic-Microfluidic Twin Channels: Toward Diverse Application of Lab-on-a-chip Systems.

High Efficiency Integration of Three-Dimensional Functional Microdevices Inside a Microfluidic Chip by Using Femtosecond Laser Multifoci Parallel Microfabrication.

Fabrication of optical fiber integrated micro-fluidic chips system by MEMS technology

Fabrication of full glass chips with hybrid micro- and nanochannels and their application to protein concentration

Integrative Optofluidic Microcavity with Tubular Channels and Coupled Waveguides Via Two-Photon Polymerization

[INVITED]Two photon polymerization integration of microlens arrays into 3D glass microchannel for cell counting

All‐Glass 3D Optofluidic Microchip with Built‐in Tunable Microlens Fabricated by Femtosecond Laser‐Assisted Etching

Ship-in-a-bottle femtosecond laser integration of optofluidic microlens arrays with center-pass units enabling coupling-free parallel cell counting with a 100% success rate.

Microfluidics on lensless, semiconductor optical image sensors: challenges and opportunities for democratization of biosensing at the micro-and nano-scale

Lab-on-a-chip with integrated optical transducers

Multi-Phase Laminar Flow Microfluidic Chip With Deep Channel And Charge Coupled Device Photometric Detection