Abstract:In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to 'scratch' nanoscale channels on polymethylmethacrylate (PMMA) substrates with sufficiently high hardness. Next, polydimethylsiloxane (PDMS) is used twice to duplicate the nanochannels onto PDMS substrates from the 'nano-scratched' PMMA substrates. A number of experiments are conducted to explore the relationships between the nano-indentation parameters and the nanochannel dimensions and to control the aspect ratio of the fabricated nanochannels. In addition, traditional photolithography combined with soft lithography is employed to fabricate microchannels on another PDMS 'cap' substrate. After manually aligning the substrates, all uncovered channels on two separate PDMS substrates are bonded to achieve a sealed and transparent nanofluidic device, which makes the dimensional transition from microscale to nanoscale feasible. The smallest dimensions of the achievable nanochannels that we have demonstrated thus far are of ~20 nm depth and ~800 nm width, with lengths extendable beyond 100 μm. Fluid flow experiments are performed to verify the reliability of the device. Two types of colloidal solution are used to visualize the fluid flow through the nanochannels, that is, ethanol is mixed with gold colloid or fluorescent dye (fluorescein isothiocyanate), and the flow rate and filling time of liquid in the nanochannels are estimated based on time-lapsed image data. The simplicity of the fabrication process, bio-compatibility of the polymer substrates, and optical transparency of the nanochannels for flow visualization are key characteristics of this approach that will be very useful for nanofluidic and biomolecular research applications in the future.

Polymeric Nanostructures Fabricated by Dynamic Nanoinscribing Technique and Its Applications

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

The Fabrication Of Nanostructures On Polydimethylsiloxane By Laser Interference Lithography

Optical Nanostructures Fabricated by Su-8 Based Nanoimprint Lithography

Nanoimprint lithography for optic fluidics with phase gratings for environmental monitoring application

Free-standing SU-8 Gratings Fabricated by Sacrificial Layer-Assisted UV Curing Imprint

Poly (ethylene Terephthalate) (PET) Micro/nanostructures Fabricated by Nanoimprint and Its Applications

Scalable Nanostructuring on Polymer by a SiC Stamp: Optical and Wetting Effects

NANOIMPRINT TECHNOLOGY : RECENT PROGRESS AND APPLICATIONS

Integrated nano-optic devices based on immersion nano-gratings made by imprint lithography and nano-trench-filling technology

100 Nm Period Gratings Produced by Lithographically Induced Self-Construction

High Aspect Ratio Grating Fabrication in Su-8 Resist by Uv-Curing Nanoimprint

Direct Nanopatterning into Conjugated Polymers Using Interference Crosslinking

Large Area Direct Nanoimprinting of SiO2–TiO2 Gel Gratings for Optical Applications

High Density Patterns Fabricated in SU-8 by UV Curing Nanoimprint

Spatially Engraving Morphological Structure on a Polymeric Surface by Ion Beam Milling.

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

Ultrafast Patterning Of Nanostructures In Polymers Using Laser Assisted Nanoimprint Lithography

Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings

Direct Optical Micropatterning of Poly(dimethylsiloxane) for Microfluidic Devices

Fabrication of Periodic Nanostructures Using Dynamic Plowing Lithography with the Tip of an Atomic Force Microscope