Abstract:Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What's more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

Spot Image Based Aberration Retrieval Method Using Parametric Model Of Point Spread Function

Performance analysis and evaluation of point spread function for full digital autofocus

Application of Vector Phase Retrieval Model in High Numerical Aperture Optical Systems

Aberration Correction Method Based on Double-Helix Point Spread Function

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Aberration Correction Method For Fourier Ptychographic Microscopy Based On Neural Network

Calculation of Aberration Fields for Freeform Imaging Systems Using Field-Dependent Footprints on Local Tangent Planes.

Realization Method of Full-Field Point Spread Function

Phase Retrieval Wavefront Measurement Model Based on the Numerical Fourier Theory

A Model-Based Regularized Inverse Method for Ultrasonic B-scan Image Reconstruction

Spherical Aberration Compensation Method for Long Focal-Length Measurement Based on Talbot Interferometry

Correcting Optical Aberration via Depth-Aware Point Spread Functions

Correction Algorithms of Pupil Aberration for Fourier Ptychographic Microscopy

3D Multi-Phase Sub-Pixel PSF Estimation Based on Space Debris Detection System

Psf Analysis On Sub-Aperture Aberrations Of Optical Synthetic Aperture Imaging System

Analytical Model of Point Spread Function under Defocused Degradation in Diffraction-Limited Systems: Confluent Hypergeometric Function

Obtaining Point Spread Function of Penumbral Encoding Aperture with "expectation Maximization" Algorithm Based on Matched Source-Image Pair Experiment.

PSF--NET: A Non-parametric Point Spread Function Model for Ground Based Optical Telescopes

Measure and Model a 3-D Space-Variant PSF for Fluorescence Microscopy Image Deblurring.

Differential Phase Retrieval Based on Phase Modulating for Wavefront Detection

Method of Image Restoration Directly Based on Spatial Varied Point Spread Function