High Performance Zn1-Xmgxo Tfts For Ultraviolet Image Sensors

X. Lin,B. B. Jiang,X. He,S. J. Li,Y. L. Li,S. D. Zhang
DOI: https://doi.org/10.1109/EDSSC.2011.6117745
2011-01-01
Abstract:This paper reports the studies on Zn1-xMgxO TFTs for UV image sensors. The channel layer of TFTs was deposited by reactive DC magnetron sputtering with Zn&Mg insetting metal target for the first time. These Zn1-xMgxO TFTs on glass substrate show excellent UV absorption window with absorption edge of 340 nm and optical transmittance of >90% in the visible range. They display a field effect mobility of 0.02 cm (2)V(-1)s(-1), a threshold voltage of 10 V, an on/off ratio of 6x10(5), and a subthreshold swing of 0.5 V/decade.
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