Magnesium-doped indium oxide thin film transistors for ultraviolet detection

Bi Xiaobin,Yao Jianke,Zhang Shengdong
DOI: https://doi.org/10.1109/EDSSC.2014.7061093
2014-01-01
Abstract:Thin films transistors (TFTs) with Magnesium-doped Indium Oxide (MIO) as active layer were investigated. The MIO active layer was deposited by RF-magnetron sputtering using ceramic targets with different chemical compositions. Measurement results show that the optical absorption edge of MIO film has a blue shift with increasing Mg content. The fabricated MIO TFT shows a sufficient driving current and a low and stable off-current. These results suggest that MIO TFT is a potential candidate for ultraviolet detection applications. © 2014 IEEE.
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