A Compact SOI Polarization Beam Splitter Based on Multimode Interference Coupler

Z. Tu,Y. W. Huang,H. X. Yi,X. J. Wang,Y. P. Li,L. Li,W. W. Hu
DOI: https://doi.org/10.1117/12.905589
2011-01-01
Abstract:A multimode interference (MMI) polarization splitter with easy fabrication process was demonstrated in Silicon-On-Insulator substrate. The minimum device size, 8 μm×1034 μm was designed by Quasi-state imaging effect theory. Numerical simulations show that this optimized MMI polarization splitter has a good fabrication tolerance. The tolerance of width and length is ±0.04 μm and ± 10 μm for transverse electric (TE) mode and ±0.14 μm and ±35 μm for transverse magnetic (TM) mode. The bandwidths are 20 nm and 80 nm for TE and TM respectively. Experiment results exhibits a -15 dB polarization extinction ratio bandwidth of 20 nm for the through-path and much wider for the cross-path. The extinction ratio and crosstalk achieve (-27.3 dB, -22.6 dB) for TE and (-26.6 dB, -23.9 dB) for TM.
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