Fabrication of complex periodic micro/nanopatterns by multiple interfered femtosecond laser pulses on thin solid films

Xia Li,Donghai Feng,Tianqing Jia,Zhenrong Sun,Zhizhan Xü

DOI: https://doi.org/10.1049/mnl.2010.0232

2011-01-01

Micro & Nano Letters

Abstract:Complex periodic micro/nanopatterns have been fabricated on zinc acetate thin films by the irradiation of three or two interfered 800 nm femtosecond laser beams. Three interfered laser beams produce 2D periodic microflower structures with petal sizes as small as 100 nm, which is much smaller than the laser wavelength and its diffraction-limited scale. While two interfered femtosecond laser beams l...