Self-Assembled Fabrication and Characterization of Vertically Aligned Binary CN Nanocone Arrays

Wei Hu,Xiaofeng Xu,Yiqun Shen,Jushui Lai,Xiaoliu Fu,Jiada Wu,Zhifeng Ying,Ning Xu
DOI: https://doi.org/10.1007/s11664-009-1029-3
IF: 2.1
2010-01-01
Journal of Electronic Materials
Abstract:Vertically aligned binary CN nanocone (CNNC) arrays were prepared by a direct-current abnormal glow discharge plasma-assisted reaction deposition method. CNNCs were grown on silicon wafers covered by Ni intermediate layers. The experiments were carried out in environments of methane and nitrogen mixtures, with a total pressure of 5 Torr and CH4/N2 pressure ratios of 1/50 to 1/10. As-grown short CNNCs can have tip diameter of curvature of only 2 nm to 3 nm and are mainly crystalline β-C3N4, while long CNNCs are mainly amorphous with inclusions of β-C3N4-coated Ni crystals. Based on characterization and analysis of the as-grown binary CN nanostructures, their growth mechanism is proposed and discussed.
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