Synthesis of Crystalline Carbon Nitride Nanocone Arrays by Direct‐Current Discharge Plasma‐Assisted CVD

Wei Hu,Ning Xu,Xiaofeng Xu,Jiada Wu,Yiqun Shen,Zhifeng Ying
DOI: https://doi.org/10.1002/cvde.200906802
2009-01-01
Chemical Vapor Deposition
Abstract:Crystalline carbon nitride nanocone (CNNC) arrays are prepared by a rather simple and facile direct current, abnormal glow discharge plasma-assisted (PA) CVD method. The CNNCs are grown on the surfaces of (100) silicon wafers covered by Co/Ni intermediate layers. The experiments are carried out in an atmosphere of mixtures of methane and nitrogen, under a total pressure of 4000 Pa, and CH(4)/N(2) pressure ratios in the range 1:50-1:5. The as-grown CNNCs are vertically aligned in arrays with rather perfect crystallinity, and smallest tip diameters of 2-3 nm. Based on the optical emission spectra from the abnormal glow discharge plasma, the growth mechanism of the as-grown CNNCs is discussed.
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