Femtosecond laser nanofabrication of field effect transistors from graphene oxides

Li Guo,Yonglai Zhang,Hong Xia,Qidai Chen,Hongbo Sun

DOI: https://doi.org/10.2351/1.5057256

2010-01-01

Abstract:We report direct femtosecond laser writing of graphene circuits from graphene oxides film by nonlinear light-matter interaction, by which the oxide is photoreduced.

What problem does this paper attempt to address?

Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Xiaodan Xu,Bin Shi,Xinzheng Zhang,Yang Liu,Wei Ca,Mengxin Ren,Xiaojie Jiang,Romano A. Rupp,Qiang Wu,Jingjun Xu

DOI: https://doi.org/10.1364/oe.26.020726

IF: 3.8

2018-01-01

Optics Express

Abstract:The fabrication ability of graphene nanostructures is the cornerstone of graphene-based devices, which are of particular interest because of their broad optical response and gate-tunable properties. Here, via laser-induced redox reaction of graphene and silica, we fabricate nano-scale graphene structures by femtosecond laser direct writing. The resolution of destructed graphene lines is far beyond the diffraction limit up to 100 nm with a precision as small as ± 7 nm. Consequently, graphene nanostructures are fabricated precisely and excellent plasmon responses are detected. This novel fabrication method of graphene nanostructures has the advantages of low costs, high efficiency, maskless and especially high precision, which would pave the way for practical application of graphene-based optical and electronic devices.
Direct Imprinting of Microcircuits on Graphene Oxides Film by Femtosecond Laser Reduction

Yonglai Zhang,Li Guo,Shu Wei,Yinyan He,Hong Xia,Qidai Chen,Hong-Bo Sun,Feng-Shou Xiao

DOI: https://doi.org/10.1016/j.nantod.2009.12.009

IF: 17.4

2010-01-01

Nano Today

Abstract:Graphene microcircuits have been successfully created on graphene oxide films via direct femtosecond laser reduction process according to preprogrammed patterns. Atomic force microscopy (AFM) characterization shows that surface height of the micropatterns was lower than the rest of the film due to the loss of oxygen confirmed by XPS and XRD techniques. The electric resistivity and conductivity of as-reduced graphene have strong dependences on output power of femtosecond laser. Moreover, current–voltage curves of graphene microcircuits show typical linear relationship, indicating the stable conductivities. The micro-nanoprocessing of graphene through femtosecond laser technologies might open the door for applications of graphene-based materials in electronic microdevices.
Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Bandgap tailoring and synchronous microdevices patterning of graphene oxides

Li Guo,Ruiqiang Shao,Yonglai Zhang,Haobo Jiang,Xianbin Li,Shengyi Xie,Binbin Xu,Qidai Chen,Junfeng Song,Hongbo Sun

DOI: https://doi.org/10.1021/jp209843m

2012-01-01

Abstract:Reported here is femtosecond laser mediated bandgap tailoring of graphene oxides (GOs) for direct fabrication of graphene-based microdevices. When femtosecond laser pulses were used to reduce and pattern GO, oxygen contents in the reduced region could be modulated by varying the laser power. In this way, the bandgap of reduced GO was precisely modulated from 2.4 to 0.9 eV by tuning the femtosecond laser power from 0 to 23 mW. Through the first-principle study, the essence of GO bandgap tailoring is proved to be femtosecond laser reduction induced oxygen-content modulation. As representative illustrations, bottom-gate graphene FETs were fabricated in situ by using femtosecond laser reduced GO as the channel material, and an optimized room temperature on off ratio of 56 is obtained. The controlled reduction of GO by femtosecond laser contributes great potential for bandgap tailoring and microdevices patterning of graphene future electronics. toward
Field Effect Transistors Based on in Situ Fabricated Graphene Scaffold–ZrO2 Nanofilms

Qingqing Pang,Hongliang Chen,Xiuyan Wang,Tao Wang,Deyan Wang,Shaoguang Feng,Hongliang Lu,Qiaowei Li

DOI: https://doi.org/10.1002/aelm.201700424

IF: 6.2

2018-01-01

Advanced Electronic Materials

Abstract:Ionic liquid‐gated electric double layer transistors (EDLTs), bottom‐gated field effect transistors (FETs), and vertical Schottky barrier transistors are fabricated by utilizing in situ prepared heterostrutural nanofilms. The nanofilms feature graphene scaffolds on top of high‐k ZrO2 dielectric, which allow transfer‐free fabrication of various transistor devices. Both the ionic liquid‐gated EDLT and bottom‐gated FET feature p‐type characteristic behaviors with notable Ion/Ioff ratio and effective carrier modulation ability. Furthermore, the applicability of the layered structure is demonstrated in construction of vertical Schottky barrier transistors, and evident rectification behavior is revealed. With the capability to construct multilayer heterostructural nanofilms on various substrates and further optimizing the interfaces between these layers for targeted modulation, the presented electronic materials show potential application in graphene‐based transistor fabrication.
Fabricating Graphene and Nanodiamonds from Lignin by Femtosecond Laser Irradiation

Yan Lin,Qijun Zhang,Yongjun Deng,Qiang Wu,Xiaofei P Ye,Siqun Wang,Guigan Fang

DOI: https://doi.org/10.1021/acsomega.1c05328

IF: 4.1

2021-12-06

ACS Omega

Abstract:This study demonstrates a new transformation path from lignin to graphene and nanodiamonds (NDs) by femtosecond laser writing in air at ambient temperature and pressure. Graphene nanoribbon rolls were generated at lower laser power. When the laser power was high, NDs could be obtained apart from graphene and onion-like carbon intermediates. These structures were confirmed by scanning electron microscopy, X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy, and high-resolution transmission electron microscopy. The effects of laser power and laser writing speed on the structure of laser-induced patterns were investigated. The results show that the laser power was more important than the writing speed for the synthesis of carbon nanoparticles, and high laser power contributed to enhanced electrically conductive performance. Therefore, the direct laser irradiation technique leads a simple, low-cost, and sustainable way to synthesize graphene and NDs and is promising for the fabrication of sensors and electric devices.
Direct Writing of Electronic Devices on Graphene Oxide by Catalytic Scanning Probe Lithography

Kun Zhang,Qiang Fu,Nan Pan,Xinxin Yu,Jinyang Liu,Yi Luo,Xiaoping Wang,Jinlong Yang,Jianguo Hou

DOI: https://doi.org/10.1038/ncomms2200

IF: 16.6

2012-01-01

Nature Communications

Abstract:Reduction of graphene oxide at the nanoscale is an attractive approach to graphene-based electronics. Here we use a platinum-coated atomic force microscope tip to locally catalyse the reduction of insulating graphene oxide in the presence of hydrogen. Nanoribbons with widths ranging from 20 to 80 nm and conductivities of >10(4) S m(-1) are successfully generated, and a field effect transistor is produced. The method involves mild operating conditions, and uses arbitrary substrates, atmospheric pressure and low temperatures (≤115 °C).
High-speed Femtosecond Laser Plasmonic Lithography and Reduction of Graphene Oxide for Anisotropic Photoresponse

Tingting Zou,Bo Zhao,Wei Xin,Ye Wang,Bin Wang,Xin Zheng,Hongbo Xie,Zhiyu Zhang,Jianjun Yang,Chunlei Guo

DOI: https://doi.org/10.1038/s41377-020-0311-2

2020-01-01

Light Science & Applications

Abstract:Micro/nanoprocessing of graphene surfaces has attracted significant interest for both science and applications due to its effective modulation of material properties, which, however, is usually restricted by the disadvantages of the current fabrication methods. Here, by exploiting cylindrical focusing of a femtosecond laser on graphene oxide (GO) films, we successfully produce uniform subwavelength grating structures at high speed along with a simultaneous in situ photoreduction process. Strikingly, the well-defined structures feature orientations parallel to the laser polarization and significant robustness against distinct perturbations. The proposed model and simulations reveal that the structure formation is based on the transverse electric (TE) surface plasmons triggered by the gradient reduction of the GO film from its surface to the interior, which eventually results in interference intensity fringes and spatially periodic interactions. Further experiments prove that such a regular structured surface can cause enhanced optical absorption (>20%) and an anisotropic photoresponse (-0.46 ratio) for the reduced GO film. Our work not only provides new insights into understanding the laser-GO interaction but also lays a solid foundation for practical usage of femtosecond laser plasmonic lithography, with the prospect of expansion to other two-dimensional materials for novel device applications.
Controllable Photoreduction of Graphene Oxide/Gold Composite Using a Shaped Femtosecond Laser for Multifunctional Sensors

Weihua Zhu,Mengmeng Wang,Zheng Zhang,Jiaxin Sun,Jie Zhan,Mingle Guan,Zhao Xu,Sumei Wang,Xin Li,Lan Jiang

DOI: https://doi.org/10.1021/acsami.3c10511

IF: 9.5

2023-11-03

ACS Applied Materials & Interfaces

Abstract:The mixture of graphene oxide and noble metal nanoparticles has been widely used in flexible multifunctional sensors. Femtosecond lasers are regarded as useful tools for sensor fabrication through direct inscribing. Normally, the laser power is adjusted to optimize the sensing performances. However, the process between the laser and the sample can be effectively altered by the temporal distribution of the pulse and the laser wavelength. This paper proposes a controllable photoreduction of...

materials science, multidisciplinary,nanoscience & nanotechnology
Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: from Fabrication Strategies to Future Applications

Zhenqiang Ma,Yong‐Lai Zhang,Bing Han,Qi‐Dai Chen,Hong‐Bo Sun

DOI: https://doi.org/10.1002/smtd.201700413

IF: 12.4

2018-01-01

Small Methods

Abstract:The past decade has seen growing research interest in developing novel fabrication methodologies for metallic micro/nanostructures toward the rational design and integration of 0D to 3D metallic configurations. Among the various fabrication techniques, femtosecond‐laser direct writing has emerged as a prominent approach to reach this goal and greatly facilitates the development of metallic micro/nanostructure‐enabled applications. Here, a series of femtosecond‐laser‐mediated fabrication strategies, including the two‐photon reduction of metal ions, template‐assisted metal coating and metal filling, photodynamic assembly of metal nanoparticles, and selective nanoparticle sintering, are summarized. Additionally, abundant applications in microelectronics, metamaterials, near‐field optics, microfluidics, micromechanics, and microsensors are introduced in detail. Current challenges and future perspectives in this field are also discussed.
Three-dimensional micropatterning of graphene by femtosecond laser direct writing technology

Yu-Qing Liu,Jiang-Wei Mao,Zhao-Di Chen,Dong-Dong Han,Zhi-Zhen Jiao,Jia-Nan Ma,Hao-Bo Jiang,Han yang

DOI: https://doi.org/10.1364/ol.45.000113

IF: 3.6

2019-12-19

Optics Letters

Abstract:The reduction and patterning of graphene oxides (GOs) have broad applications in gene transfection, cell differentiation control, etc. However, two-dimensional (2D) photoreduction technologies (such as UV lithography) fail to realize the three-dimensional (3D) reduction and patterning of GO, limiting its applications in 3D electronic device interconnection and 3D graphene organ-on-a-chip. Here we developed 3D reduction and patterning of GO by femtosecond laser direct writing (FsLDW) technology. FsLDW has been adopted for 3D structure fabrication and 2D/3D micropatterning of reduced GOs on GO films. We deem that this technology will advance GO in the evolution of future electronics.

optics
Laser Fabrication of Graphene‐Based Flexible Electronics

Rui You,Yu‐Qing Liu,Yi‐Long Hao,Dong‐Dong Han,Yong‐Lai Zhang,Zheng You

DOI: https://doi.org/10.1002/adma.201901981

IF: 29.4

2019-08-22

Advanced Materials

Abstract:Recent years have witnessed the rise of graphene and its applications in various electronic devices. Specifically, featuring excellent flexibility, transparency, conductivity, and mechanical robustness, graphene has emerged as a versatile material for flexible electronics. In the past decade, facilitated by various laser processing technologies, including the laser‐treatment‐induced photoreduction of graphene oxides, flexible patterning, hierarchical structuring, heteroatom doping, controllable thinning, etching, and shock of graphene, along with laser‐induced graphene on polyimide, graphene has found broad applications in a wide range of electronic devices, such as power generators, supercapacitors, optoelectronic devices, sensors, and actuators. Here, the recent advancements in the laser fabrication of graphene‐based flexible electronic devices are comprehensively summarized. The various laser fabrication technologies that have been employed for the preparation, processing, and modification of graphene and its derivatives are reviewed. A thorough overview of typical laser‐enabled flexible electronic devices that are based on various graphene sources is presented. With the rapid progress that has been made in the research on graphene preparation methodologies and laser micronanofabrication technologies, graphene‐based electronics may soon undergo fast development.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Graphene-Complex-oxide Nanoscale Device Concepts

Giriraj Jnawali,Hyungwoo Lee,Jung-Woo Lee,Mengchen Huang,Jen-Feng Hsu,Bi Feng,Rongpu Zhou,Guanglei Cheng,Brian DUrso,Patrick Irvin,Chang-Beom Eom,Jeremy Levy

DOI: https://doi.org/10.48550/arXiv.1706.10254

2018-04-05

Abstract:The integration of graphene with complex-oxide heterostructures such as LaAlO$_3$/SrTiO$_3$ offers the opportunity to combine the multifunctional properties of an oxide interface with the electronic properties of graphene. The ability to control interface conduction through graphene and understanding how it affects the intrinsic properties of an oxide interface are critical to the technological development of novel multifunctional devices. Here we demonstrate several device archetypes in which electron transport at an oxide interface is modulated using a patterned graphene top gate. Nanoscale devices are fabricated at the oxide interface by conductive atomic force microscope (c-AFM) lithography, and transport measurements are performed as a function of the graphene gate voltage. Experiments are performed with devices written adjacent to or directly underneath the graphene gate. Unique capabilities of this approach include the ability to create highly flexible device configurations, the ability to modulate carrier density at the oxide interface, and the ability to control electron transport up to the single-electron-tunneling regime, while maintaining intrinsic transport properties of the oxide interface. Our results facilitate the design of a variety of nanoscale devices that combine unique transport properties of these two intimately coupled two-dimensional electron systems.

Mesoscale and Nanoscale Physics
Gate-Tunable Optical Nonlinearities and Extinction in Graphene/LaAlO 3 /SrTiO 3 Nanostructures

Erin Sheridan,Lu Chen,Jianan Li,Qing Guo,Shan Hao,Muqing Yu,Ki-Tae Eom,Hyungwoo Lee,Jung-Woo Lee,Chang-Beom Eom,Patrick Irvin,Jeremy Levy

DOI: https://doi.org/10.1021/acs.nanolett.0c01379

IF: 10.8

2020-09-01

Nano Letters

Abstract:We explore the ultrafast optical response of graphene subjected to intense (∼106 V/cm) local (∼10 nm) electric fields. Nanoscale gating of graphene is achieved using a voltage-biased, SrTiO3-based conductive nanowire junction "written" directly under the graphene and isolated from it by an insulating ultrathin (<2 nm) LaAlO3 barrier. Upon illumination with ultrafast visible-to-near-infrared (VIS-NIR) light pulses, the local field from the nanojunction creates a strong gate-tunable second-order nonlinearity in the graphene and produces a substantial difference-frequency (DFG) and sum-frequency generation (SFG) response detected by the nanojunction. Spectrally sharp, gate-tunable extinction features (>99.9%) are observed in the VIS-NIR and SFG spectral ranges, in parameter regimes that are positively correlated with the enhanced nonlinear response. The observed graphene–light interaction and nonlinear response are of fundamental interest and open the way for future exploitation in graphene-based optical devices such as phase shifters, modulators, and nanoscale THz sources.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acs.nanolett.0c01379?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acs.nanolett.0c01379</a>.Materials and methods; C-AFM lithography and I–V curves; pulse shaping and time domain measurements; graphene four-terminal resistance measurement; graphene chemical potential shift estimate; additional data from VG dependence experiment; additional data from VNW dependence experiment; additional experiments and figures (<a class="ext-link" href="/doi/suppl/10.1021/acs.nanolett.0c01379/suppl_file/nl0c01379_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Laser-Assisted Nanofabrication of Carbon Nanostructures

Yun Shen Zhou,Wei Xiong,Jongbok Park,Min Qian,Masoud Mahjouri-Samani,Yang Gao,Lan Jiang,Yong Feng Lu

DOI: https://doi.org/10.2351/1.4716046

IF: 2.1

2012-01-01

Journal of Laser Applications

Abstract:An overview of laser-assisted techniques developed in our group for fabricating carbon nanostructures, including two-dimensional graphene, one-dimensional carbon nanotubes, and zero-dimensional carbon nanoonions, is presented. Unique laser-material interactions provide versatile possibilities in fabricating carbon nanostructures, including localized heating, direct laser writing, tip-enhanced optical near-field effect, polarization, ablation, resonant excitation, precise energy delivery, and mask-free direct patterning. Rapid single-step fabrication of graphene patterns was achieved using laser directing writing. Parallel integration of single-walled carbon nanotubes was realized by making use of tip-enhanced optical near-field effect. High-quality carbon nanoonions were obtained through laser resonant excitation of precursor molecules.
Direct Writing of Graphene Patterns on Insulating Substrates under Ambient Conditions.

Wei Xiong,Yun Shen Zhou,Wen Jia Hou,Li Jia Jiang,Yang Gao,Li Sha Fan,Lan Jiang,Jean Francois Silvain,Yong Feng Lu

DOI: https://doi.org/10.1038/srep04892

IF: 4.6

2014-01-01

Scientific Reports

Abstract:To unleash the full potential of graphene in electronics and optoelectronics, high-quality graphene patterns on insulating substrates are required. However, existing methods generally follow a "synthesis + patterning" strategy, which are time consuming and costly for fabricating high-quality graphene patterns on desired substrates. We developed a nanofabrication process to deposit high-quality graphene patterns directly on insulating substrates via a solid-phase laser direct writing (LDW) process. Open-air and room-temperature fabrication of graphene patterns on insulating substrates has been achieved via a femtosecond LDW process without graphene transfer and patterning. Various graphene patterns, including texts, spirals, line arrays, and integrated circuit patterns, with a feature line width of 800 nm and a low sheet resistance of 205 ohm/sq, were fabricated. The LDW method provides a facile and cost-effective way to fabricate complex and high-quality graphene patterns directly on target substrates, which opens a door for fabricating various advanced functional devices.
Laser Liftoff Enabled Batch Fabrication of Ultrathin Graphene Hall Devices

Jinpeng Tian,Junqi Huang,Man Wang,Keqing Yu,Hu Guo,Wenchao Luo,Yinghui Dong,Yizhe Wang,Zhixing Zhang,Wenwei Zhang,Cheng Wang,Yuan Jia

DOI: https://doi.org/10.1021/acsami.4c12499

IF: 9.5

2024-11-28

ACS Applied Materials & Interfaces

Abstract:When optimizing the interface between low-dimensional materials and flexible substrates, the surface properties are essential for preserving their exceptional electronic properties. This study presents an approach to fabricating flexible low-dimensional electronic devices using a laser liftoff process that enables optimal interface quality and batch fabrication. Graphene Hall sensors on 6-μm polyimide substrates were batch-fabricated to demonstrate the utility of this approach. The sensors...

materials science, multidisciplinary,nanoscience & nanotechnology
Laser Direct Writing Graphene Patterns on Sio2/Si Substrates

Lisha Fan,Wei Xiong,Yang Gao,Jongbok Park,Yunshen Zhou,Lan Jiang,Yongfeng Lu

DOI: https://doi.org/10.1117/12.2001405

2013-01-01

Abstract:Direct fabrication of graphene patterns on SiO2/Si substrates was demonstrated using a single-step laser-induced chemical vapor deposition (LCVD) process. A laser beam was used to irradiate a nickel-coated SiO2/Si substrate in a methane-hydrogen environment to induce a local temperature rise on the laser focused area. Followed by a rapid cooling process by moving the laser beam, graphene patterns were formed on the laser scanning pathway. Nickel (Ni) layer under graphene patterns was removed by the Ni etchant diffused into the area under the graphene. Laser direct writing graphene patterns on SiO2/Si substrates was achieved. Energy dispersive X-ray diffraction spectroscopy was used to confirm the removal of Ni layers. The discovery and development of the LCVD growth process provide a route for the rapid fabrication of graphene-based electronic devices.
Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Feng Chen,Qing Yang,Hao Bian,Jiale Yong,Guangqing Du

DOI: https://doi.org/10.1109/cleoe-eqec.2017.8087747

2017-01-01

Abstract:Due to their low-cost, comparable transparency and ease of preparation, polymers are widely used to fabricate various micro- and nano-structures for their applications in micro-optics, micro-fluidics, biomedical systems and so on. And in recent years, femtosecond (fs) laser direct writing process has become a popular tool to fabricate arbitrary three-dimensional (3D) microstructures with nanometer accuracies. Here we present fabricating polymer micro- and nano-structures via femtosecond laser. The tunable adhesive superhydrophobic surfaces achieved by femtosecond laser microprocessing may be potentially used in microfluidic systems to modulate the mobility of liquid droplets.
Graphene mode-locked ultrafast laser.

Zhipei Sun,Tawfique Hasan,Felice Torrisi,Daniel Popa,Giulia Privitera,Fengqiu Wang,Francesco Bonaccorso,Denis M Basko,Andrea C Ferrari

DOI: https://doi.org/10.1021/nn901703e

IF: 17.1

2010-01-01

ACS Nano

Abstract:Graphene is at the center of a significant research effort. Near-ballistic transport at room temperature and high mobility make it a potential material for nanoelectronics. Its electronic and mechanical properties are also ideal for micro- and nanomechanical systems, thin-film transistors, and transparent and conductive composites and electrodes. Here we exploit the optoelectronic properties of graphene to realize an ultrafast laser. A graphene-polymer composite is fabricated using wet-chemistry techniques. Pauli blocking following intense illumination results in saturable absorption, independent of wavelength. This is used to passively mode-lock an erbium-doped fiber laser working at 1559 nm, with a 5.24 nm spectral bandwidth and approximately 460 fs pulse duration, paving the way to graphene-based photonics.

Femtosecond laser nanofabrication of field effect transistors from graphene oxides

Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Direct Imprinting of Microcircuits on Graphene Oxides Film by Femtosecond Laser Reduction

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Bandgap tailoring and synchronous microdevices patterning of graphene oxides

Field Effect Transistors Based on in Situ Fabricated Graphene Scaffold–ZrO2 Nanofilms

Fabricating Graphene and Nanodiamonds from Lignin by Femtosecond Laser Irradiation

Direct Writing of Electronic Devices on Graphene Oxide by Catalytic Scanning Probe Lithography

High-speed Femtosecond Laser Plasmonic Lithography and Reduction of Graphene Oxide for Anisotropic Photoresponse

Controllable Photoreduction of Graphene Oxide/Gold Composite Using a Shaped Femtosecond Laser for Multifunctional Sensors

Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: from Fabrication Strategies to Future Applications

Three-dimensional micropatterning of graphene by femtosecond laser direct writing technology

Laser Fabrication of Graphene‐Based Flexible Electronics

Graphene-Complex-oxide Nanoscale Device Concepts

Gate-Tunable Optical Nonlinearities and Extinction in Graphene/LaAlO 3 /SrTiO 3 Nanostructures

Laser-Assisted Nanofabrication of Carbon Nanostructures

Direct Writing of Graphene Patterns on Insulating Substrates under Ambient Conditions.

Laser Liftoff Enabled Batch Fabrication of Ultrathin Graphene Hall Devices

Laser Direct Writing Graphene Patterns on Sio2/Si Substrates

Manufacturing of Functional Polymer Micro- and Nano-Structures by Femtosecond Laser Pulse

Graphene mode-locked ultrafast laser.