Fabrication of Ultra-Sensitive Cantilever for Single Electron Spin Detection and Design of Magnetic Tip

LIU Yong,ZHAO Gang,CHEN Yuhang,KONG Wen,CHU Jiaru

DOI: https://doi.org/10.3969/j.issn.1004-1699.2010.10.007

2010-01-01

Abstract:We have designed and fabricated the ultra-sensitive cantilevers for single electron spin detection.A SOI wafer with a 1 μm-thick device layer was used as the fabrication material.The cantilevers were patterned on the device layer,and then thinned to 0.5 μm-thick through thermal oxidation;meanwhile,an oxide protection layer for cantilever was generated.During the bulk silicon etching,the cantilever was protected by black wax and the silicon oxide.The buried oxide layer etching and the cantilever cleaning were both under liquid without pulling it out.The Q factor of a cantilever with 465 μm×10 μm×0.5 μm dimensions is 23 000 in a vacuum chamber at room temperature.It is believed that the cantilever is sensitive enough for single spin detection at low temperature.We simulated the magnetic field of three types of magnet tips,and found that a conical magnet tip shows the strongest field gradient at the near field.