Abstract:Microscale Laser Shock Processing (μLSP) can generate compressive residual stress in Micro Electromechanical Systems (MEMS) components through laser-induced plasma and pressure pulse for improving fatigue performance and wear resistance. It’s the generation of shock wave that produces plastic deformation and residual stress. For the first time, the propagation laws of shock wave in material treated by microscale laser beam were researched, and the influence factors, including the selected path and its mode, length of selected path, radius of the laser beam, laser intensity and number of shock impact, were discussed, which compared with ones of millimeter level for the laws of propagation and attenuation. The thickness of target material suitable for measuring shock wave was proved theoretically. All the results established theoretical foundation for the research and experiment of stress wave in materials for μLSP.Microscale Laser Shock Processing (μLSP) can generate compressive residual stress in Micro Electromechanical Systems (MEMS) components through laser-induced plasma and pressure pulse for improving fatigue performance and wear resistance. It’s the generation of shock wave that produces plastic deformation and residual stress. For the first time, the propagation laws of shock wave in material treated by microscale laser beam were researched, and the influence factors, including the selected path and its mode, length of selected path, radius of the laser beam, laser intensity and number of shock impact, were discussed, which compared with ones of millimeter level for the laws of propagation and attenuation. The thickness of target material suitable for measuring shock wave was proved theoretically. All the results established theoretical foundation for the research and experiment of stress wave in materials for μLSP.

Modeling and Investigating of Shock Pressure for Microscale Laser Shock Processing

Analysis of Influence Factors on Microscale Laser Shock Processing in FEM Simulation

Numerical and Experimental Study of Microscale Laser Shock Processing Using Excimer Laser

FEM Calculation of Microscale Laser Shock Processing on MEMS Material with Excimer Laser

Numerical Simulation on Shock Wave Propagation for Microscale Laser Shock Processing

Experimental Analysis of Microscale Laser Shock Processing on Metallic Material Using Excimer Laser

Numerical Simulation Research on Laser Shock Forming of Thin Metal Sheet

Laser Shock Processing Of Micro Arc Thickness

Hydrodynamic model and simulation of liquid phase during laser shock process

Investigation on Laser-Induced Shock Pressure with Condensed Matter Model and Experimental Verification

Study on numerical simulation of residual stresses induced by laser shock processing

3-D FEM simulation of laser shock processing

Study on Residual Stress of Laser Shock Processing Based on Numerical Simulation and Orthogonal Experimental Design

Numerical Simulation and Experimentation of Overlapping Laser Shock Processing with Symmetry Cell

Numerical modeling of residual stress induced by laser shock processing

Simulation of the elasto-plastic response and residual stresses near metal surface due to laser shock processing

Numerical Simulation Research on Laser Shock Forming

Numerical and experimental investigation of laser shock microhydroforming technology for microforming thin-walled LA103Z alloy foil with complex microfeatures

An Analytical Model To Predict Residual Stress Field Induced By Laser Shock Peening

Laser shock micro-bulk forming: Numerical simulation and experimental research

Shock Pressure Induced by Glass-Confined Laser Shock Peening: Experiments, Modeling and Simulation