PMUT array design for a handwriting input system

Wenjun Liao,Tianling Ren,Yi Yang,Xiangming Kong,Yiping Zhu,Ligang Wang,Yufeng Wang,Gujin Miao,Litian Liu
DOI: https://doi.org/10.1109/MEMSYS.2010.5442325
2010-01-01
Abstract:The novel handwriting input system (HIS) has been designed with the ferroelectrics-based micro-acoustic array, which has been fabricated using silicon based micro-machining process. This array is composed of two acoustic dipoles. It can increase output acoustic power effectively while maintaining omni-direction.
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