Abstract:This paper presents an AlN-based piezoelectric micromachined ultrasonic transducer (PMUT) with a double-beam suspended structure. In order to obtain greater deflection displacement and output sound pressure compared to standard systems, a suspended structure is proposed, achieved by utilizing double-sided deep reactive ion etching of the silicon substrate. This structure is capable of greatly reducing the tensile stress caused by deflection on the membrane edge, thereby improving the piezoelectric micromachined ultrasound transducer performance. Simulations are performed using the finite element method and COMSOL software, with results demonstrating that the suspension structure exhibits a lower resonant frequency and a larger membrane deflection displacement than other methods, implying higher penetration and acoustic energy levels. Thus, the sound pressure is improved by changing the PMUT structure. Moreover, a PMUT with a double-beam is fabricated, and the impedance diagram is determined with an impedance analyzer. The resonant frequency of the transducer was 31.88 kHz, while the sound wave received by the standard lead zirconate titanate (PZT) ultrasonic transducer was converted to a voltage of 277.5 mV. In comparison, the proposed PMUT demonstrates an improved acoustic emission performance. In addition, the electromechanical coupling coefficient of the suspended PMUT is observed to be approximately 3.08%, which is significantly better than that of a fully clamped PMUT. This demonstrates the strong electromechanical conversion performance of the proposed PMUT. Results from the transmission and reception air experiments prove that the proposed double-beam PMUT can potentially be used for ranging and wireless energy transmission applications.

Study on AlN Micromachined Ultrasonic Transducer Array with Beamforming

Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications

An Aln-Based Piezoelectric Micromachined Ultrasonic Transducer with a Double-Beam Suspended Structure

Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array.

Design, Fabrication, Characterization and Simulation of AlN PMUT for Sonar Imaging Applications

3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI

Design and Fabrication of High-Performance Piezoelectric Micromachined Ultrasonic Transducers Based on Aluminum Nitride Thin Films

Fabrication Process and Performance Analysis of AlN Based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure.

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film

A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Simulation and Optimization of Piezoelectric Micromachined Ultrasonic Transducer Unit Based on AlN

An Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer (Pmut) Array

Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

Fabrication and Characterization of AlN Based Piezoelectric Micromachined Ultrasonic Transducer for Contact Sensing

Study of the Properties of AlN PMUT used as a Wireless Power Receiver

Photoacoustic Imaging Based on AlN MF-PMUT with Broadened Bandwidth

Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array

Design and Characterization of High-Density Ultrasonic Transducer Array

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking

High Voltage Excitation And Nonlinear Transmission Of A 16 Mhz Aln-Based Piezoelectric Micro-Machined Ultrasonic Transducer