Effects of fabrication methods on structure of porous anodic aluminum oxide films

Zhanwang Li,Zhilin Xia,YiYu Xue,Peitao Guo,Lixin Zhao
DOI: https://doi.org/10.3788/CJL201037s1.0324
2010-01-01
Abstract:Highly ordered porous anodic alumina(PAA) films are fabricated with the sulfuric and oxalic acid as electrolyte and by the two-step anodization method. The crystal structure of aluminum foil before and after annealing process is examined with X-ray diffraction(XRD). Field-emission scanning electron microscope(FE-SEM) and atom force microscope(AFM) are used to observe the surface and cross morphology of PAA films. The pore diameters(20-100 nm), pore distances (50-150 nm), depths(0.2-70 μm) and densities 10 9-10 12 /cm 2 can be well controlled. The forming process and mechanism of PAA film are discussed. The effects of aluminium pre-treatments, the electrolytes type, anodizing voltages and electrolyte concentrations on PAA film's stractures are analyzed.
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