Mechanically Coupled Synchronized Resonators for Resonant Sensing Applications

Jinyang Feng,Xiongying Ye,Masayoshi Esashi,Takahito Ono
DOI: https://doi.org/10.1088/0960-1317/20/11/115001
2010-01-01
Journal of Micromechanics and Microengineering
Abstract:This paper reports resonators consisting of mechanically coupled synchronized elements. With properly fabricated mechanically coupled cantilevers with integral ratio of resonant frequency, synchronization of mechanical vibration can be achieved. It is demonstrated that the frequency noise of a cantilever with large noise can be improved if the cantilever is synchronized with the coupled cantilever with lower noise. In addition, the frequency response signal of this kind of synchronized resonators can be enlarged by signal transfer from a low-frequency cantilever to a high-frequency cantilever. The frequency shift of the low-frequency cantilever under external force can be amplified by the coupled high-frequency cantilever based on the synchronization.
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