Ultra low power solenoid MEMS fluxgate sensor with amorphous alloy core

jian lei,yong zhou,zhimin zhou,lei chen,chong lei,xiaohu yang
DOI: https://doi.org/10.1166/sl.2011.1705
2011-01-01
Abstract:A novel micromachined fluxgate sensor with integrated solenoid coils and amorphous alloy core is developed. The ultra low power consumption is achieved due to amorphous alloys ribbon materials and optimized core structure. The device exhibits a power consumption of 2.4mW, a sensitivity of 55V/T and a linear range of -150μT-150μT as excitation current of 40mA at 40kHz. ©2010 IEEE.
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