A Research of Roll and Motion Straightness Synchronous Measurement Based on an Interferometer
YANG Zhenkun,JIN Tao,HAN Mengying,HOU Wenmei
DOI: https://doi.org/10.3901/jme.2020.20.012
2020-01-01
Journal of Mechanical Engineering
Abstract:A laser heterodyne interference system for the simultaneous measurement of the roll angle and motion straightness of a precision linear stage is presented. The interference system consists of a Koster prism, a corner cube, a beam splitter, a 1/2 wave plate, a right angle prism, a quarter wave plate, a wedge prism and a wedge mirror. The wedge prism is fixed on the linear guide as a sensor for measuring the straightness and the roll angle. When the light of the dual-frequency laser is injected into the interference system, a spatially symmetric six-beam measurement signal is formed. The spatial structure is symmetrical, and the system’s common optical path makes the optical resolution twice as high as that of the ordinary Michelson interferometer, the optical path dead zone can be minimized. The system has good stability and strong resistance to environmental interference. The optical path symmetry makes the optical path variation of the increasing or decreasing the same. Only the change of the straightness and the roll angle can enter the optical path difference, effectively eliminating the crosstalk of other degrees of freedom and the crosstalk of the Bayer error enables high precision measurements. Experiments show that two beams of light parallel to each other and different frequencies are in the same reflection system. When the straightness shift and the roll angle change, the difference between the straightness and the roll angle can be directly obtained by the different phase information carried by the two beams. It does not require a large mirror of the same length as the reference for high resolution, it is simple, practical and can be directly traced to the meter definition.