Structural and Thermal Stabilities of Ultrathin Diamond-Like Carbon Films by Filtered Cathodic Vacuum Arc Deposition

Lianhua Chen,Xiaozhou Che,Ping Wang,Hongtao Ma,Hongxin Fang

DOI: https://doi.org/10.3969/j.issn.1672-7126.2009.03.20

2009-01-01

Abstract:The ultrathin diamond-like carbon (DLC) films, grown by filtered cathodic vacuum arc (FCVA) technique, were annealed in argon for 6 hours at different temperatures. The impacts of film growth and annealing conditions on the properties of the films were studied. The structure and thermal stabilities of the DLC films were characterized with Raman spectroscopy and ellipsometry spectroscopy and conventional optical probes. The results show that the film thickness strongly affects the sp3 density and the thermal stability of the films. For instance, as the film thickness grows from 2 nm to 30 nm, the sp3 density increases, peaking at 30 nm with the highest thermal stability. And annealing at 600°C turns the amorphous phase of the films, 2 nm to 5 nm thick, into nano-crystalline. However, the films, with thickness ranging from 10 nm to 30 nm, remain to be amorphous. As the annealing temperature rises up, the band gap, Eg, of the DLC films with different thickness increases first, and then decreases.