Abstract:Using plasma-enhanced chemical vapor deposition (PECVD), a series of diamond-like carbon (DLC) films were prepared on YG8 carbide substrate by changing the enhancement mode and the negative bias voltage of the substrate. The structure and properties of the deposited films were tested by a series of analytical and testing instruments. During the deposition of DLC films, the ability of electrons to collide and ionize the gas is enhanced by increasing the number of electrons and extending the movement path of electrons, which is called electron-assisted enhanced gas ionization. Four different experimental modes (A mode, B mode, C mode, D mode) were set up. Different experimental modes have different degrees of electron-assisted enhancement ability of gas ionization, so different experimental modes are called different enhancement modes. The ions ionized by the electrons participate in the deposition of the film under the traction of the negative bias voltage of the substrate. The results show that: when depositing diamond-like carbon films, the energy of the ion beam is indirectly affected by electron collisions in different enhancement modes and directly affected by the negative bias voltage of the substrate. The higher the enhancement mode, the higher the ion beam energy. The higher the substrate negative bias voltage, the higher the ion beam energy generated by gas source discharge. Under the dual action of enhancement mode and substrate negative bias voltage, the total energy of ions involved in deposition should not be too high or too low, and the synergy of the two makes the properties and quality of the deposited film reach a better value. For industrial large-scale production of tool protection film for cutting aluminum alloy, it is more suitable for high enhancement mode and low negative bias voltage production. Through a series of process optimization to improve and enhance the comprehensive performance of DLC film, it is further applied to the actual processing application field, which has great industrial and social value to realize the large-scale application of DLC film in the field of hard to cut metal processing.

Thermal Stability of Metal-Doped Diamond-Like Carbon Fabricated by Dual Plasma Deposition

Tribological Properties of Diamond-Like Carbon Films Deposited by Vacuum Arc

Research Progress of Metal Doped Diamond-like Carbon Films

Diamond-Like Carbon Thin Films Deposited On Ti6al4v Alloy Surface By Plasma Gun At Atmospheric Pressure

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Wear-resistance of Diamond-like Carbon Thin Films Deposited on the Metal Seal Ring Surface by Plasma Gun at an Atmospheric Pressure

Annealing Effect on Microstructure of Novel Ti Doped DLC Multilayer Films

Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Thermal Conductive Performance of Deposited Amorphous Carbonmaterials by Molecular Dynamics Simulation

Diamond-like Carbon Film Synthesized by Ion Beam Assisted Deposition and Its Tribological Properties

Structural Characters and Tribological Properties of Diamondlike Carbon Films

Structural Characterization And Properties Enhancement Of Diamond-Like Carbon-Films Synthesized Under Low-Energy Ne+ Bombardment

Effects of deposited particle energy on the structure and properties of diamond-like carbon films

The Influence of Deposition Temperature on the Microscopic Process of Diamond-like Carbon (DLC) Film Deposition on a 2024 Aluminum Alloy Surface

Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Properties and structures of diamond-like carbon film deposited using He, Ne, Ar/methane mixture by plasma enhanced chemical vapor deposition

Preparation, Characterization and Tribological Properties of Diamond-Like Carbon Film on AZ31 Magnesium Alloy

Experimental Study of Diamond-like Carbon Film on Aermet100 Steel and First-Principles Calculation of Interfacial Adhesion

Electrodeposition of Diamond-Like Carbon Films from Organic Solvents and Effects of Annealing on the Film Structure