A novel micromachined quartz gyroscope based on shear stress detection

Liqiang Xie,Haoxu Wang,Zhanqiang Hou,Dingbang Xiao,Xuezhong Wu,Shengyi Li
DOI: https://doi.org/10.1109/icsens.2009.5398266
2009-01-01
Abstract:This paper presents a demonstration of a novel quartz gyroscope. The sensor has a simple structure in XY plane. Compared with conventional quartz gyroscopes' two parallel independent electrodes on each sidewall, this sensor's electrodes are easy to form and the structure can be miniaturized easily. The structure is etched from a z-cut wafer. The drive mode frequency is about 5.6 kHz, and the quality factor is over 5000 in atmosphere. The spectral lines in the signal's FFT curve validate the novel design scheme. ©2009 IEEE.
What problem does this paper attempt to address?