The Evaluation on Electromigration Reliability of Copper Interconnect Structures with Extension

杜鸣,马佩军,郝跃
DOI: https://doi.org/10.3969/j.issn.1000-3819.2009.04.027
2009-01-01
Abstract:The electromigration(EM) reliability of Cu interconnects is closely related with the grain structure,geometric structures,technology and dielectric materials.The interconnect line samples with and without extension were produced in this paper.Failure acceleration tests were carried out on the samples.The result of the tests shows the interconnect lines with extension have longer lifetime and better EM reliability.The failure mode of the structure with extension is discussed.Based on the process,it is pointed out that interconnects EM performance can be improved effectively by using the structure with extension.The factors,which affect the reliability,won't be introduced with the application of the structure with extension.Therefore,it is an effective method to improve the Cu interconnects EM reliability.
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