Mathematical Modeling and Optimization Design of an Electromagnetic Micro-Machined Vibrating Ring Gyroscope

陈李,陈德勇,王军波,毋正伟,张明

DOI: https://doi.org/10.3969/j.issn.1672-6030.2009.03.009

2009-01-01

Abstract:A novel electromagnetic micro-machined vibrating ring gyroscope(MVRG) was proposed.In order to optimize its design and improve its performance,the mathematical model for MVRG was established,which was based on the deduction of lumped model for micro-machined gyroscope;moreover,the factors affecting the sensitivity of MVRG were obtained.Based on the above,the parameters of MVRG were optimized.Both finite element analysis(FEA) simulations and experiments were used to validate the mathematical model and the design scheme.Computation results show that the mechanical sensitivity of the gyroscope designed is 0.002 3 μm/((°)·s-1) and electrical sensitivity is 0.062 μV/((°)·s-1) over a range of-200—200(°)·s-1.The FEA simulation shows that the mechanical sensitivity is 0.002 9 μm/((°)·s-1) and test results through phase locked amplifier show that the electrical sensitivity is 0.051 μV/((°)·s-1).The results of FEA simulation and experiments agree with the theoretical values,which proves that the mathematic model is correct and the design scheme of the gyroscope is feasible.