Design and Fabrication of a Microfluidic Chip Driven by Dielectric Elastomers

Bo Li,Hualing Chen,Jiuhui Wu,Zicai Zhu,Dongmei Xia,Sufang Jing
DOI: https://doi.org/10.1117/12.838431
2009-01-01
Abstract:This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2 mu l is achieved under 3500V, 8Hz sine wave.
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