Studies On Digital Microfluidic Chip For Micro-Total-Analysis Systems

Jiangang Wu,Ruifeng Yue,Xuefeng Zeng,Ming Kang,Huan Hu,Zheyao Wang,Litian Liu
DOI: https://doi.org/10.3321/j.issn:0253-3820.2006.07.034
IF: 1.193
2006-01-01
Chinese Journal of Analytical Chemistry
Abstract:A programmable digital microfluidic chip based on electrowetting-on-dielectric is presented, consisting of a sandwiched configuration. The controlled droplets were sandwiched between two parallel plates. The bottom plate consists of silicon used as the substrate, a heavy doped poly-silicon as the microelectrode array, a SiO2 film spin-coated by a Teflon AF1600 film as the hydrophobic dielectric layer. The top plate is a transparent electrode spin-coated by a Teflon AF1600 film. The physical mechanisms and simulations of the fundamental fluidic operations ( transporting, cutting, and merging) based on electrowetting-on-dielectric were researched. The operations of transporting and merging on deionized droplets of 0.35 mu L and 0.45 mu L were successfully achieved in air by applying the low actuation voltages of 35 V, and the cutting operation on the deionized droplet of 0.8 mu L was also achieved by applying the voltage of 70 V.
What problem does this paper attempt to address?