Abstract:Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufacturing and inspection calls for the next-generation precision stages that have light weight and high control bandwidth simultaneously. In today's design techniques, the stage's first flexible mode is limiting its achievable control bandwidth, which enforces a trade-off between the stage's acceleration and closed-loop stiffness and thus limits the system's overall performance. To overcome this challenge, this paper proposes a new hardware design and control framework for lightweight precision motion stages with the stage's low-frequency flexible modes actively controlled. Our method proposes to minimize the resonance frequency of the controlled mode to reduce the stage's weight, and to maximize that of the uncontrolled mode to enable high control bandwidth. In addition, the proposed framework determines the placement of the actuators and sensors to maximize the controllability/observability of the stage's controlled flexible mode while minimizing that of the uncontrolled mode, which effectively simplifies the controller designs. Two case studies are used to evaluate the effectiveness of the proposed framework. Simulation results show that the stage designed using the proposed method has a weight reduction of more than 55% compared to a baseline stage design. Improvement in control bandwidth was also achieved. These results demonstrate the effectiveness of the proposed method in achieving lightweight precision positioning stages with high acceleration, bandwidth, and precision.

Modeling and Analysis of the Coupling Effect for One Kind of Coarse-Fine Stages

Design and Cooperation Control Analysis of a Coarse-Fine Dual Stage Drive Positioning System

Modeling and analyzing for ultra-precision coarse-fine stage

Coupled Dynamic Modeling and Analysis of Ultra-precision 6-DOF Fine Stage

Preliminary Exploration on Control Theory of Ultraprecision Stage with Large Travel

Research on Multi-Parametric Coupling Design Method of Deformable Boring Bar in Embedded Giant Magnetostrictive Actuator

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Coupling Mechanism Analysis and Dynamic Modeling for Lorentz Motor Motion Control

Modeling and analyzing of an H-drive precision XY stage

Modeling, Identification, and Adaptive Robust Motion Control of Voice-Coil Motor Driven Stages

Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes

A Dual-Stage Control System for High-Speed, Ultra-Precise Linear Motion

Optimization of Current Distribution Coefficients to Decouple the 6-DOF Fine Stage of Lithographic Equipment

Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

Design, optimization, and characterization of an XY nanopositioning stage with multi-level spatial flexure hinges for high-precision large-stroke motion guidance

Generation Mechanism and Decoupling Strategy of Coupling Effect in Maglev Planar Motor

Multi-axis Coupling of Machining Centers Based on Electromechanical Modeling

Control Co-design of Actively Controlled Lightweight Structures for High-acceleration Precision Motion Systems

Multi-variable Coupling Technology Based on the Integration of Structural Variation and Simulation Analysis

Identification and Compensation of Stiffness and Damping Between Short and Long Stroke in Wafer Stage

Dual Drive System Modeling And Analysis For Synchronous Control Of An H-Type Gantry