Coupling Mechanism Analysis and Dynamic Modeling for Lorentz Motor Motion Control

MU Hai-hua,ZHOU Yun-fei,ZHOU Yan-hong
DOI: https://doi.org/10.3321/j.issn:0258-8013.2009.15.015
2009-01-01
Abstract:The complex motion including a rough motion of long stroke permanent magnet linear motor and a fine motion of short stroke Lorentz motor is employed to realize nanometer positioning accuracy and tracking accuracy. The motion control of short stroke stage is the most important issue for achieving ultra-precision motion accuracy. However, its motion control suffers from some serious coupling disturbances.Coupling factors and coupling mechanism of motion control for short stroke Lorentz motor were analyzed, and the model of coupling mechanism was estibilished. The dynamic models of position dependency and force dependency were proposed with coupling mechanism model, respectively. The principle was constructed to simplify the derived dynamic models. As a result,overall dynamic model of Lorentz motor's motion control was presented. The experimental results show the effectiveness and the feasibility of the proposed models.
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