Coupled Dynamic Modeling and Analysis of Ultra-precision 6-DOF Fine Stage

Yi JIANG,Yu ZHU,Kaiming YANG,Xin LI,Dongdong YU
DOI: https://doi.org/10.13334/j.0258-8013.pcsee.2014.30.024
2014-01-01
Abstract:The coupling in the MIMO motion control system is a key factor for the motion performance. In order to achieve nanoscale positioning and tracking accuracy with high motion velocity, the establishment of the internal coupling mechanism and dynamic modeling of the control system is needed. The study focuses on an ultra-precision contactless 6-DOF fine stage, which is driven by eight Lorentz motors and gravity compensators. According to the structure model and control requirements, two coupling models are established: position-dependency and force-dependency coupling. The first mode is to connect the control point and the center of mass, and the second mode is to connect the center of mass and the actuators. Finally, the overall decoupling mode is proved to be feasibility and effectiveness by experiments.
What problem does this paper attempt to address?