Measurement on Surface Profile of Aspherical Liquid Micro-Lens

何建慧,詹珍贤,吴云良,王克逸
DOI: https://doi.org/10.3969/j.issn.1007-2276.2008.02.035
2008-01-01
Infrared and Laser Engineering
Abstract:Precise measurement of surface profile of liquid is one of key problems for fabrication of aspherical lens liquid micro-lens.A measurement method of surface profile of aspherical liquid micro-lens based on digital image processing was proposed.The surface profile image of the aspherical liquid lens was imaged on a CCD camera by an objective,and then read in computer by an image grabber.In order to study the deformation of the liquid lens shape with the increase of the electrostatic force,a serious of image processing approaches were employed to obtain the polynomial expression of the lens surface profile.The main measurement approaches included collecting image,reducing noise,creating a binary image using threshold method,detecting the image edge,rectifying horizontal deflexion to obtain the coordinate of the single pixel,polynomial fitting,etc.The key technology was solved and the actual measuring experiment was carried out.This measurement method is accurate and useful for the fabrication of aspherical liquid lenses with fine optical performance.
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