Improving contact of CNT - metal by annealing

Miao-miao TAN,Xiong-ying YE,Xiao-hao WANG,Zhao-ying ZHOU
DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.01.051
2008-01-01
Abstract:The contact quality between CNTs and metal electrodes is an important factor for nano devices. Samples with CNTs assembled between a pair of Au electrodes by dielectrophoresis were respectively annealed at the temperature of 200°C, 300°C and 400°C for an hour and then cooled naturally. By measuring I-V curves, the contact quality of samples was tested before and after annealing. The contact quality between CNTs and metal electrodes got better after annealing. Even though it became worse with time passing, it is still better than that before annealing. With annealing at 300°C for 30 min, 60 min, 90 min, experimental results showed that the contact resistance decrease with prolonging the annealing time.
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