Preparation and Ferroelectric Properties of Bi 3.4 Ce 0.6 Ti 3 O 12 Thin Films Grown by Sol-Gel Method

Guo DongYun,Li MeiYa,Liu Jun,Yu BenFang,Pei Ling,Wang YunBo,Yu Jun,Yang Bin
DOI: https://doi.org/10.1007/s11431-007-0049-6
2008-01-01
Abstract:We have investigated the preparation and properties of Bi3.4Ce0.6Ti3O12 thin films. The Bi3.4Ce0.6Ti3O12 thin films were fabricated on the Pt/Ti/SiO2/Si substrates using sol-gel method. The structure and morphology of the films were characterized using X-ray diffraction and atomic force microscopy. The thin films showed a perovskite phase and dense microstructure. The dielectric constant and the dissipation factor of the Bi3.4Ce0.6Ti3O12 thin films were about 172 and 0.031 at 1 kHz, respectively. The 2P r and 2E c of the Bi3.4Ce0.6Ti3O12 thin films were 67.1 μC/cm2 and 299.7 kV/cm, respectively, under an applied field of 600 kV/cm. The Bi3.4Ce0.6Ti3O12 film did not show fatigue up to 4.46×109 switching cycles at a frequency of 1 MHz, and showed good insulating behavior according to the test of leakage current.
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