Effect of Nitrogen Content on the Microstructure and Properties of Cnx Films Deposited by Pulsed Bias Arc Ion Plating

Li Hungkai,Lin Guoqiang,Dong Chuang,Wen Lishi
DOI: https://doi.org/10.3321/j.issn:0412-1961.2008.08.005
IF: 1.797
2008-01-01
ACTA METALLURGICA SINICA
Abstract:The uniform, smooth and dense CNx films with x <= 0.189 were deposited on cemented carbide substrate at different nitrogen flow rates by pulsed bias arc ion plating. The surface morphology, composition, structure, hardness and elastic modulus of CNx films were observed and measured by SEM, GIXRD, XPS, Raman spectra and nanoindentation, respectively. The result shows that the nitrogen content in the CNx films increases linearly and then slowly with the nitrogen flow rate increasing. The XRD result indicates that the deposited films were amorphous. The hardness and elastic modulus increase and then decrease with nitrogen content increasing. The hardness and elastic modulus of the film with x=0.081 reach the maximum values of 32.1 GPa and 411.8 GPa, respectively. The Raman spectra results suggest that the deposited films have the typical characteristic of diamond-like carbon films. The I-D/I-G ratio decreases and then increases with increasing nitrogen content, and the minimum value, which corresponds to the highest sp(3) content, was obtained at x=0.081. The change of sp(3) content by adjusting the nitrogen content in the CNx films is the important factor that influences the hardness of the films.
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