Preparation of DLC/TiAlN/(Ti, Al)/Cr composite films

Yichen Zhang,Dechun Ba,Shengge Ma

2008-01-01

Abstract:Combining arc ion plating technology with middle frequency unbalanced magnetron sputtering process, DLC/TiAlN/(Ti, Al)/Cr composite films are deposited on different substrates by changing working ambience, bias mode, sputtering current and assisted ion beam current. Using SEM, laser Raman spectrometer, micro-nano mechanical testing instrument (CMS) and triometer tester, the performances of surface morphology, crystal structure, micro-hardness and wear resistance of DLC/TiAlN/(Ti, Al)/Cr composite films are detected and analyzed. Experiments and analysis results show that, relatively standard DLC thin films are prepared by middle frequency unbalanced magnetron sputtering and Ar ion beam assisted deposition; Hall ion beam assisted deposition helps to reduce the surface roughness of composite films and the friction coefficient. Increasing Hall ion beam, the ion bombardment on film's surface is enhanced, and the film's compactability and smoothness are improved. The friction coefficient of DLC/TiAlN/(Ti, Al)/Cr composite films is lower than that of TiAlN film, so the wear resistance of DLC/TiAlN/(Ti, Al)/Cr composite films is obviously prominent.