Spectroscopic Characterization of Microwave Plasma under Atmospheric Pressure

XIE Hong-duan,SUN Bing,ZHU Xiao-mei,LIU Yong-jun
DOI: https://doi.org/10.16411/j.cnki.issn1006-7736.2008.04.003
2008-01-01
Abstract:Spectroscopic intensity of microwave plasma composed of mixed gas under atmospheric pressure was measured to study the influence of gas component and microwave power on the plasma properties.The spectroscopy of excited state oxygen atom in microwave plasma was investigated at various operating conditions including oxygen ratio in gas mixtures and microwave power.The experimental results indicate that the density of excited state oxygen atom increases first and then decreases with increasing the ratio of oxygen in argon and oxygen gas mixtures,and the density of excited state oxygen atom reaches the maximum value when microwave power is 400 W,the gas flow of argon gas and oxygen is 4 L/min and 40 cm3/min respectively.The increasing of microwave power induces the density of excited state particles increasing,which lead to the density of ionized state particles increasing.
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