Structure and Tribological Properties of Al-DLC Films Prepared by Medium Frequency Magnetron Sputtering

ZHANG Guang-an,WANG Peng,CHEN You-ming,WANG Xia,YAN Peng-xun,ZHANG Jun-yan
DOI: https://doi.org/10.3321/j.issn:1004-0595.2008.02.005
2008-01-01
Tribology
Abstract:Al containing diamond-like carbon(Al-DLC) thin films were deposited on Si substrate by medium frequency magnetron sputtering.The microstructure,morphology and mechanical properties of the Al-DLC films were investigated by means of X-ray photoelectron spectroscopy,infrared spectrometry,atomic force microscopy and nano-indentation test.The tribological property of the Al-DLC films was studied on a micro ball on disk tester.The friction and wear behavior of the Al-DLC films sliding against Si3N4 ceramic ball was evaluated on a ball-on-disk tribometer.The morphologies of the wear scar of the films were observed on a scanning electron microscope.The film had typical diamond-like characteristics and the film surface was very smooth and compact.The hardness of the films was relatively high while the stress was low.It exhibited good friction-reducing and anti-wear behavior as sliding against a Si3N4 ball.The films prepared at-1 600 V pulse bias exhibited even lower fiction coefficient and much longer wear life compared to the films prepared at-1 600 V pulse bias.
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