MEMS based sensors for explosive detection: Development and discussion

Deyi Kong,Yongguang Qi,Lili Zhou,Bingtao Lin,Zhuang Li,Ronghua Zhu,Chilai Chen
DOI: https://doi.org/10.1109/NEMS.2008.4484332
2008-01-01
Abstract:In this paper, the development of explosive detection with MEMS technology was briefly reviewed. Various detecting methods were classified in microcalorimetric spectroscopy, optical displacement measuring, resonance frequency shift measuring, piezoresistive strain monitoring, heat absorption or release monitoring, and FA-IMS. Advantages and disadvantages of each method were respectively discussed.
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