Design of a MEMS varactor and Analysis of its Phase Noise

Zheng WANG,Ze-wen LIU
DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.02.056
2008-01-01
Abstract:Design and phase noise analysis of a MEMS varactor is presented. Metal layer on the substrate is used to control the parasitic capacitance in the configuration. The effect of etch hole on the up-capacitor electrode is simulated using HFSS, and the best size which will not effect the capacitance is found to be 5 μm. On the assumption of the constant parasitic capacitance, the phase noise of MEMS varactor is analysed. Based on a SPICE model, simulations of phase noise have been performed using HSPICE. Its' found that the typical phase noise due to Brownian motion is -176dBc/Hz, and acoustic noise is -137dBc/Hz.
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