Synthesis of Si3N4/polyimide hybrid films

YuQuan Wen,Yihe Zhang,Wei Zhen,Qingsong Su,Lihang Zhao
2008-01-01
Advanced Materials Research
Abstract:Si3N4/polyimide hybrid films based on 4,4-oxydianiline (ODA) and pyromellitic dianhydride(PMDA) were prepared by incorporation with different content of nano-sized Si3N4. In this study, the effect of Si3N4 on the microstructure of the Si3N4/polyimide film was characterized by Fourier Transform Infrared Spectrometry (FTIR), scanning electron microscope (SEM). The dependence of mechanical properties and thermal stability of the Si 3N4/polyimide film were also investigated. The hardness from unload of the Si3N4/polyimide film were expressly investigated for the first time. © 2008 Trans Tech Publications.
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