Characterizations of Elastic Constants of Transparent Thin Films Deposited on Substrates by Laser Ultrasonic Method

Zhe Li,Di Ma,Shu-yi Zhang,Kiyotaka Wasa,Xiu-ji Shui
DOI: https://doi.org/10.1109/spawda.2008.4775807
2008-01-01
Abstract:A laser generation and optical difference detection method of surface acoustic waves is used for characterizing elastic constants of thin films deposited on substrates. The film/substrate samples are prepared by a RF magnetron sputtering technique. Teflon-like films, deposited on three kinds of substrates, silicone plates, glass and copper plates, have been studied and the related parameters have been evaluated.
What problem does this paper attempt to address?