Effects of Proton Irradiation on a CMOS Image Sensor

Huang Qiang,Meng Xiang-Ti
DOI: https://doi.org/10.1088/0256-307x/24/2/069
2007-01-01
Chinese Physics Letters
Abstract:We perform 9 MeV proton irradiation of a complementary metal oxide semiconductor (CMOS) image sensor at doses from 1 x 10(9) to 4 x 10(10) cm(-2). In general, the average brightness of dark output images increases with an increasing dose, and reaches the maximum at 1 x 10(10) cm(-2). The captured colour images become very blurry at 4 x 1010 cm-2. These can be explained by change of concentrations of irradiation-induced electron-hole pairs and vacancies in the various layers of CMOS image sensor calculated by the TRIM simulation programme with dose.
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