Measurement of 3-D Profile Using Micro Fringe Projection Correlation Method

SUN Wei,DONG E-liang,YANG Fu-jun,HE Fang,QIN Ming,HE Xiao-yuan
DOI: https://doi.org/10.3321/j.issn:1000-1158.2007.01.003
2007-01-01
Abstract:Based on the principle of demodulating the displacement of the projected fringes with digital image correlation method,a micro fringe projection correlation method is proposed.This method combines fringe projection method and digital image correlation method into one optical system,which is a novel method for measuring 3-D profile and out-of-plane displacement of micro structures. The principle and detailed calibration process of this method is described systematically.Moreover,an experimental research on the measurement of membrane deflection using micro fringe projection correlation method is also made.The measuring results show that micro fringe projection correlation method is simple and efficient,which provides a novel application foreground in dynamic and static measurement for micro structures with high magnification microscopes and high-speed CMOS camera.
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