Flexible and accurate system calibration method in microscopic fringe projection profilometry

Junlin Du,Xiaopeng Luo,Jiangping Zhu,Shiyong An,Pei Zhou
DOI: https://doi.org/10.1364/ao.507420
IF: 1.9
2024-01-05
Applied Optics
Abstract:Junlin Du, Xiaopeng Luo, Jiangping Zhu, Shiyong An, Pei Zhou The three-dimensional (3D) measurement task of complex microstructures holds paramount significance in the domains of precision ... [Appl. Opt. 63, 383-389 (2024)]
optics
What problem does this paper attempt to address?