Grounded Coplanar Waveguide with Via Holes for High-speed Integrated EA Modulator/DFB Laser Module

Zhizhi Liu,He Yuan,Changzheng Sun,Ming-Jun Zhang,Pengfei Cai,Yi Luo

DOI: https://doi.org/10.1109/inow.2007.4302925

2007-01-01

Abstract:Layout of via holes on the grounded coplanar waveguide (GCPW) is optimized to suppress undesirable parallel plate modes. The suppression effect has been demonstrated by experimental measurements.

What problem does this paper attempt to address?

Resonance Suppression of Grounded Coplanar Waveguide in Submount for 40 Gb/s Optoelectronic Modules

Jianming Xu,Changzheng Sun,Bing Xiong,Yi Luo

DOI: https://doi.org/10.1007/s10762-008-9442-x

2008-01-01

Abstract:It is a key issue in optoelectronic modules to feed high-frequency microwave signals to device chips with low loss and reflection. In our work, microwave resonances in frequency response of 40 Gb/s optoelectronic modules are suppressed through theoretical and experimental optimization. Such resonances due to microstrip-like modes of grounded coplanar waveguide (GCPW) severely degrade the performance of optoelectronic devices. The resonances can be suppressed by introducing metal-walled via holes in GCPW submount. The diameter and the spacing of the via holes are optimized to be 0.2 mm and 0.8 mm, respectively. An electroabsorption modulated laser (EML) module with over 30 GHz modulation bandwidth has been demonstrated without obvious high frequency resonances.
Low-threshold DFB-laser-integrated High-Speed EA Modulators Based on Ridge Waveguide Structure by ICP Etching

B Xiong,CZ Sun,J Wang,ZB Hao,Y Luo

DOI: https://doi.org/10.1117/12.480999

2002-01-01

Abstract:Inductively coupled plasma (ICP) dry etching technique has been adopted to form narrow high-mesa ridge waveguide structure in a high-speed integrated EA modulator. A 3dBe bandwidth of over 12 GHz has been achieved without the use of polyimide in the DFB laser integrated EA modulator. Meanwhile, integrated device with a threshold current as low as 12 mA has been demonstrated by optimization of the wavelength detuning.
Electro-Optic Silicon Modulator With Horizontal Photonic Crystal Slot Slab

Biao Qi,Fan Wang,Simiao Xiao,Xiang Wang,Yinlei Hao,Xiaoqing Jiang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.806515

2009-01-01

Abstract:The properties of truly confined modes of a 2D hex horizontal photonic crystal slot slab waveguide are analyzed. Then the dispersion of liner defect waveguide is calculated. In addition, what influence the slots with different height have over the band structure and the group velocity dispersion of the defect mode waveguide are analyzed. Based on these studies, an ultra-compact silicon-based Mach-Zehnder amplitude modulator is proposed. For a design with almost negligible first order chromatic dispersion in an optical bandwidth of 1THz, we predict a modulation bandwidth of 40GHz and a length of about 80 mu m. This is achieved by infiltrating an electro-optic polymer into a slotted photonic crystal waveguide, the strong field confinement in slotted waveguides and the slow light interaction enhancements provided by the photonic crystal waveguide, where group velocity and dispersion may be controlled.
High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator

Bing Xiong,Jianbo Tian,Jian Wang,Pengfei Cai,Changzheng Sun,Yi Luo

DOI: https://doi.org/10.1007/s10762-005-8446-z

2005-01-01

International Journal of Infrared and Millimeter Waves

Abstract:A high-speed submount has been designed and fabricated for 40 Gb/s electroabsorption (EA) modulators. The submount contains a coplanar waveguide (CPW) for microwave signal feeding and a Ta2N thin-film resistor for impedance matching. The CPW transmission line is designed to ensure low microwave loss and reflection, and Ti/Cu/Ni/Au metal is adopted for electrode fabrication to guarantee good contact with the Ta2N thin-film. The typical reflection coefficient of fabricated submount is estimated to be lower than−21 dB up to 40 GHz. As a demonstration, a high-speed EA modulator was chip-level packaged using the high-speed submount, and the measured small-signal modulation bandwidth was over 40 GHz.
Tunable V-Coupled-Cavity Semiconductor Laser Monolithically Integrated with Monitoring Photodiodes Using Deeply Etched Reflective Trenches

Xiaolu Liao,Jianjun Meng,Jian-Jun He

DOI: https://doi.org/10.1117/12.2073603

2014-01-01

Abstract:We present a 1560-nm-band digitally wavelength tunable V-coupled-cavity semiconductor laser monolithically integrated with two waveguides based monitoring photodiodes (MPD) through deeply etched reflective trenches. The reflective trenches are designed to be 1.16 mu m wide, about three quarters of the wavelength, and are deeply etched through the waveguide with a depth larger than 4 mu m. Due to the high reflectivity of the etched trenches, a low threshold current of 19mA is achieved. Using a single electrode control, wavelength tuning of 22 channels at 100GHz spacing with SMSR above 35 dB is obtained. The relationship between the photocurrents of the two MPD at the two waveguide branches and the laser output power from the coupler side is investigated as a function of the wavelength. Since the integrated tunable laser with MPDs is very compact and does not involve any grating or epitaxial regrowth, it is suitable for low-cost multifunctional photonic applications for access and data center networks.
Design and Improvement of InP-based Traveling Wave Mach-Zehnder Modulator for Monolithic Integrated with V-cavity Laser

Zhongwen Wang,Qi Chen,Siyang Zhou,Jian-Jun He

DOI: https://doi.org/10.1117/12.2656977

2022-01-01

Abstract:We propose a simple and effective model to properly design the monolithically integrated tunable optical transmitter based on the traveling wave Mach-Zehnder modulator (TW-MZM) and V-cavity laser (VCL). Firstly, the integrated structure of TW-MZM and VCL is presented. Then we put forward a TW-MZM model to design and improve the performance of the electro-optic (EO) modulation bandwidth of the optical transmitter. By changing the structural parameters of the optical waveguide and the traveling wave electrodes, we reduce the microwave transmission loss from 3 mm-1 to 0.6 mm-1 at 20 GHz and thus increase the theoretical electro-optic response from 13.5 GHz to 52.8 GHz. Due to the high modulation efficiency from the Quantum Confined Stark Effect (QCSE) in quantum wells, the traveling wave modulator is very compact with a length of only 600 μm.
Half-Wave-Coupled Ring-FP Laser with 50-Channel 100-Ghz-spaced Wavelength Tuning

Lin Wu,Zhipeng Hu,Xiaolu Liao,Jian-Jun He

DOI: https://doi.org/10.1109/jphot.2014.2345876

IF: 2.4

2014-01-01

IEEE Photonics Journal

Abstract:We report our latest experimental results of the half-wave-coupled rectangular ring-FP laser. All the waveguides of the device are active, and the thermooptic effect is employed to extend the tuning range beyond the free-spectral-range limit. Singleelectrode tuning of 20 channels with 100-GHz spacing is obtained. By combining five single-electrode-controlled tuning curves with different bias currents on fixed electrodes and with the thermoelectric cooler fixed at 20 °C, wavelength tuning of 50 channels with 100-GHz spacing covering the L-band is achieved with a side-mode suppression ratio up to 41 dB. Direct modulation at 2.5 Gb/s is also demonstrated. The simple and compact ring-FP laser has great potential as a low-cost tunable laser for many applications.
Design of Compact and Low-Emi Waveguide Structures Based on Through Glass Vias

Xing-Chang Wei,Xiao-Juan Wang,De-Cao Yang,Jun Li,Xin Wei

2014-01-01

Abstract:In this paper, two kinds of compact waveguide structures based on through glass vias (TGVs) technology are proposed. A full-wave simulator on the basis of finite element method is applied to analyze the transmission characteristics of these structures. The return loss S11, transmission S21 and electric field distribution results show that they have the similar signal transmission performance of the traditional full waveguide structures. The air filled TGVs are employed in the proposed waveguides. Simulation results show that these air filled vias can concentrate electromagnetic field within the waveguides, and hence reduce the electromagnetic interference.
Tunable V-Cavity Laser Monolithically Integrated with Traveling Wave Mach-Zehnder Modulator

Qi Chen,Zhongwen Wang,Jiasheng Zhao,Jianjun Meng,Guocai Song,Jian-Jun He

DOI: https://doi.org/10.1109/lpt.2022.3198520

IF: 2.6

2022-01-01

IEEE Photonics Technology Letters

Abstract:We present the monolithic integrated widely tunable V-cavity laser and traveling wave Mach-Zehnder modulator operating in the C-band. A wide wavelength tuning of 64 channels from 1513 nm to 1565 nm is obtained with SMSRs mostly over 40 dB. The $\text{V}_{\pi }$ is 5.5 V and the static extinction ratio is 14 dB. The 3-dB electro-optic bandwidth is measured to be 14.2 GHz. By optimizing the device structure and thickness of intrinsic region on a semi-insulating substrate wafer, a theoretical bandwidth over 40 GHz can be achieved.
Direct Modulation of Widely Tunable V-Cavity-Laser for Low-Cost WDM Access Networks

Jianjun Meng,Hongli Zhu,Sen Zhang,Li Zou,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2013.aw4a.6

2013-01-01

Abstract:We demonstrate direct modulation in compact widely tunable V-cavity-laser. Dynamic mode hopping is avoided and well-open eye diagrams were measured for 2.5Gbps and 5Gbps after 50km and 20km transmissions, respectively.
Low-Cost Gap Waveguide Technology Using Shallow Grooves and Glide-Symmetric Semicircular-Holes EBG Structures

Wenhao Tan,Yijing He,Hao Luo,Guoqiang Zhao,Houjun Sun

DOI: https://doi.org/10.1109/lawp.2023.3303864

IF: 4.2

2023-01-01

IEEE Antennas and Wireless Propagation Letters

Abstract:In this paper, a novel electromagnetic bandgap (EBG) structure is proposed to manufacture gap waveguides (GWs) at high frequencies. The proposed EBG structure combines parallel shallow grooves and glide-symmetric semicircular holes, located on the upper and lower plate, respectively. Attributed to much-reduced milling depth, an efficient and easier manufacturing process can be realized for the proposed structure. Besides, the layout of the milling grooves can be flexibly adapted, making the proposed EBG structure more easily conformal with GWs. As a validation of the concept, both straight and bent side-by-side GWs exploring the proposed EBG structure are elaborately designed, fabricated and experimentally tested, verifying the features of low loss and high isolation, respectively.

telecommunications,engineering, electrical & electronic
Development of Electro-Optical Pcbs with Embedded Waveguides for Data Center and High Performance Computing Applications

M. Immonen,J. Wu,H. J. Yan,L. X. Zhu,P. Chen,T. Rapala-Virtanen

DOI: https://doi.org/10.1117/12.2039875

2014-01-01

Abstract:Power consumption and scaling the performance and quantity of electrical interconnects for data traffic inside boards and backplanes are one of the critical barriers envisaged in next‐generation Data Center (DC) and High‐Performance Computing (HPC) applications. In this paper, we report developments of electro-optical PCBs (EO-PCB) with embedded polymer waveguide layers. We show results for fabricating realistic product emulator test vehicles that comprise of reasonable form factor PCBs with optical and electrical layers. The optical layer comprise of multiple waveguides exhibiting a full range of geometric configurations required to meet practical optical routing functions. Test patterns include varied cross-sectional sizes, 90° bends of varying radii (40mm – 2mm), cascaded bends with varying radii, waveguide crossings with varied crossing angles (90° - 20°), splitters, tapered waveguides and waveguide interconnect to midboard interface slots. Moreover, results for fabricating electrical interconnect structures (e.g. tracing layers, vias, plated vias) top/bottom and through optical layers in OE-PCB stack are shown. The purpose of the complex routed copper layers is to enable the crucial demonstration of the fabrication and thermal robustness challenges inherent to electro-optical PCBs with optical layers. Process compatibility with accepted practices and challenges in production scale up for high volumes are key concerns to meet the yield target and cost efficiency. Results include waveguide characterization, waveguide transmission loss, misalignment tolerance, and effect of lamination. Moreover, we show results on waveguide termination by in-plane edge connector and with 90° out-of-plane couplers.
High-performance CMOS-cornpatible Micromachined Edge-Suspended Coplanar Waveguides on Low Resistivity Silicon Substrate

LLW Leung,JW Zhang,WC Hon,KJ Chen

2004-01-01

Abstract:This paper reports a novel low-loss CMOS compatible coplanar waveguide (CPW) structure based on the micromachined edge-suspension of the signal line. It is revealed that, at radio or microwave frequencies, the current is highly concentrated along the edges of the signal line. Since the coupling to the low resistivity silicon substrate is dominated by the current carrying part, the substrate coupling and loss can he effectively suppressed by removing the silicon along and underneath the edges of the signal lines. The edge-suspended structure has been implemented by a combination of deep reactive ion etching and anisotropic wet etching. The suspended structure shows much reduced loss (0.5 dBlmm at 39 GHz) and strong mechanical strength that is provided by the silicon underneath the center of the signal line.
Modeling and Parameter Extraction of Cmos On-Chip Coplanar Waveguides Up to 67 Ghz for Mm-Wave Applications

Luo Jun,Zhang Lei,Wang Yan

DOI: https://doi.org/10.1088/1674-4926/34/12/125008

2013-01-01

Abstract:Coplanar waveguides(CPW) are widely used in mm-wave circuits designs for their good performance.A novel unified model of various on chip CPWs for mm-wave application,together with corresponding direct parameter extraction methodologies,are proposed and investigated,where standard CPW,grounded CPW(GCPW) and CPW with slotted shield(SCPW) are included.Several kinds of influences of different structures are analyzed and considered into the model to explain the frequency-dependent per-unit-length L,C,R,and G parameters,among which the electromagnetic coupling for CPWs with large lower ground or shield is described by a new C–L–R series path in the parallel branch.The direct extraction procedures are established,which can ensure both accuracy and simplicity compared with other reported methods.Different CPWs are fabricated and measured on 90-nm CMOS processes with Short-Open-Load-Through(SOLT) de-embedding techniques.Excellent agreement between the model and the measured data for different CPWs is achieved up to 67 GHz.
High-speed (10-40 Gb/s) Electroabsorption Modulator Integrated Devices for Fiber Communications

Y Luo,B Xiong,J Wang,CZ Sun

DOI: https://doi.org/10.1117/12.636184

2005-01-01

Abstract:In this talk, identical epitaxial layer high speed electroabsorption (EA) modulator integrated light sources are studied systematically. Firstly, a 1.55 mu m 10 Gb/s distributed feedback (DFB) laser integrated EA modulated laser is presented, which adopts a partially gain-coupled DFB laser to improve single-mode yield. The typical measured small signal response indicates a 3 dB electrical bandwidth over 10 GHz. Secondly, a 1.55 mu m laterally coupled DFb laser is fabricated to eliminate the necessity of additional regrowth, in order to reduce the process complexity and fabrication cost. A stable single-mode operation has been demonstrated with a side mode suppression ratio over 45 dB at an injection level of 60 mA. Finally, an SOA integrated EA modulator with a planar ridge waveguide is fabricated for 40 Gb/s optical fiber communication systems. The device is chip-level packaged and tested on a coplanar waveguide based submount. The small signal frequency modulation responses of the integrated EA modulator are measured and simulated based on an equivalent circuit. The measured 3 dBe modulation bandwidth exceeds 40 GHz, and it is estimated to be over 45 GHz.
Suppression of Modal Crosstalk in Laser-Direct-writing Weakly-Guiding Bending Multimode Waveguides

Yu Yang,Junchi Jia,Mingqing Zuo,Yuyang Gao,Zhangyuan Chen,Yongqi He,Juhao Li

DOI: https://doi.org/10.1016/j.optcom.2022.128421

IF: 2.4

2022-01-01

Optics Communications

Abstract:Space division multiplexing (SDM) techniques based on few-mode or multicore fibers have attracted great interest to enhance the capacity of optical networks, for which laser direct writing (LDW) is a promising approach to realize compact spatial multiplexer/demultiplexer (MUX/DEMUX). However, the modal crosstalk induced by bending multimode waveguide in LDW spatial MUXs/DEMUXs may have significant influence on the overall performance of a weakly-coupled SDM system supporting independent spatial channels. In this paper, we firstly analyze the bend-induced mode coupling behaviors for linearly-polarized (LP) modes in circularly-symmetric-step-index weakly-guiding bending multimode waveguides (WGBMW) and show that LP01 and LP11 modes will have the strongest mode coupling. Then we propose an optimal design of 90-bend and S-bend using hybrid Euler-Circular (HEC) bend, where the length of Euler bend is optimized to be the beat length of LP(01 )and LP(11 )modes to suppress their mode coupling. Numerical simulations based on conformal mapping model and three-dimensional Beam Propagation Method are performed. The simulation results show that the optimal HEC bend can significantly suppress the mode crosstalk and loss. The crosstalk of LP01 and LP11 modes for the optimal HEC bend is below -60 dB, whereas the value for the circular bend is about -23 dB. This work provides a better understanding of bend-induced mode coupling in WGBMWs and is beneficial for the practical design of LDW devices.
BCB/InP Based Wideband and Low Loss Coplanar Waveguide Microwave Transmission Line

侯海燕,熊兵,徐建明,周奇伟,孙长征,罗毅

DOI: https://doi.org/10.16818/j.issn1001-5868.2008.05.030

2008-01-01

Abstract:A wideband(0~40 GHz),low loss coplanar waveguide microwave transmission line based on BCB polymer/InP substrate was designed and fabricated for high speed traveling-wave electro-absorption(EA) modulators.Based on the simulation of the structure of coplanar waveguides,the key structure factors including the thickness of BCB films,the conductivity of InP substrate,and the signal electrode width were optimized.The simulation results show that the optimum microwave transmission can be obtained at BCB film thickness of 4 μm,InP conductivity less than 0.002(Ω·cm)-1 and signal electrode width of 84 μm.Therefore,by using a semi-insulated InP substrate with resistivity of 108 Ω·cm and a 4 μm thick spin-coated BCB thin film,a coplanar waveguide transmission line was fabricated with microwave loss less than 0.5 dB/mm in 0~40 GHz range.
Controllable Lasing Behavior Enabled by Compound Dielectric Waveguide Grating Structures

Zhenqing Zhang,Yunhui Li,Wenxing Liu,Jinzhe Yang,Youqiao Ma,Hai Lu,Yong Sun,Haitao Jiang,Hong Chen

DOI: https://doi.org/10.1364/oe.24.019458

IF: 3.8

2016-01-01

Optics Express

Abstract:The photonic density of states (PDOS) is one of the key physical quantities governing the lasing behavior for photonic band-edge lasers. The PDOS is conventionally altered by exploiting the high-Q band-edge mode within a device, which is typically achieved by increasing the contrast of periodic refractive index variation (Δn) or increasing the periodic number of the photonic crystals. In this paper, we propose a different approach to achieve a high-Q band edge mode within an active compound dielectric waveguide grating (CWDG). We demonstrate that the lasing threshold and intensity can be flexibly tuned by changing the filling factors of the CWDG. This design can effectively improve the performance of electrically pumped photonic band-edge lasers.
Method to Change the Through-Hole Structure to Broaden Grounded Coplanar Waveguide Bandwidth

Jiangmiao Zhu,Zhaotong Wan,Kejia Zhao

DOI: https://doi.org/10.3390/s23094342

IF: 3.9

2023-04-27

Sensors

Abstract:A grounded coplanar waveguide (GCPW), as a millimeter wave special transmission line, can be used to calibrate broadband oscilloscope probes. A method to change the through-hole structure to widen the GCPW is investigated in this paper. The effect of the through-hole array on the band-width of the GCPW is investigated and verified using COMSOL Multiphysics simulation software. Finally, the S-parameters of the fabricated GCPWs are measured by a vector network analyzer, and the results show that they have an insertion loss > −3 dB and return loss < −10 dB in the frequency range of DC to 60 GHz, which satisfies the design requirements.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Triple-layered optical interconnecting integrated waveguide chip based on epoxy cross-linking fluorinated polymer photonic platform

Jian Yue,Xiangyi Sun,Chunxue Wang,Sheng Zhang,Lei Han,Jinkai Wang,Zhanchen Cui,Zuosen Shi,Daming Zhang,Changming Chen

DOI: https://doi.org/10.1364/OE.489929

2023-06-05

Abstract:In this study, a triple-layered optical interconnecting integrated waveguide chip was designed and fabricated using an epoxy cross-linking polymer photonic platform. Fluorinated photopolymers FSU-8 and AF-Z-PC EP were self-synthesized as waveguide cores and cladding materials, respectively. The triple-layered optical interconnecting waveguide device comprised 4 × 4 arrayed waveguide grating (AWG) -based wavelength-selective switching (WSS) arrays, 4 × 4 multi-mode interference (MMI) -cascaded channel-selective switching (CSS) arrays, and 3 × 3 direct-coupling (DC) interlayered switching arrays. The overall optical polymer waveguide module was fabricated by direct UV writing. For the multilayered WSS arrays, the wavelength-shifting sensitivity was ∼0.48 nm/°C. For the multilayered CSS arrays, the average switching time was ∼280 µs, and the maximum power consumption was <30 mW. For interlayered switching arrays, the extinction ratio approximated 15.2 dB. The transmission loss for the triple-layered optical waveguide chip was measured as 10.0-12.1 dB. The flexible multilayered photonic integrated circuits (PIC) can be used in high-density integrated optical interconnecting systems with a large-volume optical information transmission capacity.

Grounded Coplanar Waveguide with Via Holes for High-speed Integrated EA Modulator/DFB Laser Module

Resonance Suppression of Grounded Coplanar Waveguide in Submount for 40 Gb/s Optoelectronic Modules

Low-threshold DFB-laser-integrated High-Speed EA Modulators Based on Ridge Waveguide Structure by ICP Etching

Electro-Optic Silicon Modulator With Horizontal Photonic Crystal Slot Slab

High-Speed Coplanar Waveguide Based Submount for 40 Gbit/s Electroabsorption Modulator

Tunable V-Coupled-Cavity Semiconductor Laser Monolithically Integrated with Monitoring Photodiodes Using Deeply Etched Reflective Trenches

Design and Improvement of InP-based Traveling Wave Mach-Zehnder Modulator for Monolithic Integrated with V-cavity Laser

Half-Wave-Coupled Ring-FP Laser with 50-Channel 100-Ghz-spaced Wavelength Tuning

Design of Compact and Low-Emi Waveguide Structures Based on Through Glass Vias

Tunable V-Cavity Laser Monolithically Integrated with Traveling Wave Mach-Zehnder Modulator

Direct Modulation of Widely Tunable V-Cavity-Laser for Low-Cost WDM Access Networks

Low-Cost Gap Waveguide Technology Using Shallow Grooves and Glide-Symmetric Semicircular-Holes EBG Structures

Development of Electro-Optical Pcbs with Embedded Waveguides for Data Center and High Performance Computing Applications

High-performance CMOS-cornpatible Micromachined Edge-Suspended Coplanar Waveguides on Low Resistivity Silicon Substrate

Modeling and Parameter Extraction of Cmos On-Chip Coplanar Waveguides Up to 67 Ghz for Mm-Wave Applications

High-speed (10-40 Gb/s) Electroabsorption Modulator Integrated Devices for Fiber Communications

Suppression of Modal Crosstalk in Laser-Direct-writing Weakly-Guiding Bending Multimode Waveguides

BCB/InP Based Wideband and Low Loss Coplanar Waveguide Microwave Transmission Line

Controllable Lasing Behavior Enabled by Compound Dielectric Waveguide Grating Structures

Method to Change the Through-Hole Structure to Broaden Grounded Coplanar Waveguide Bandwidth

Triple-layered optical interconnecting integrated waveguide chip based on epoxy cross-linking fluorinated polymer photonic platform