A low-noise charge sensitive amplifier for MEMS capacitive sensors

Wang Zhanfei,Li Zhihong,Ni Xuewen,Mo Bangxian
DOI: https://doi.org/10.1109/ICSICT.2006.306433
2007-01-01
Abstract:This paper describes a low-noise charge sensitive amplifier (CSA) for MEMS capacitive sensors which uses a chopper technique to reduce the low-frequency noise and offset. The feedback resistors of the CSA are implemented as a MOS-bipolar pseudo-resistors and an input common-feedback (ICMFB) is designed to prevent large output errors from input common-shift and maintain the op-amp within its input common-mode range. A simulated resolution of 5.8aF (rms) in capacitive change integrated over the signal band is achieved while chopped at 1 MHz. © 2006 IEEE.
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